INFICON LDS3000 Originalbetriebsanleitung Seite 97

INFICON
LDS2010 Analog
Einstell. Ausgang
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LDS3000(AQ)-MSM-Bedienungsanleitung-jiqa54de1-10-(1911)
Funktion LDS2010
Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-5 mbar l/s
Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-3 mbar l/s
Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-6 mbar l/s
Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-4 mbar l/s
Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-7 mbar l/s
Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-5 mbar l/s
Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-8 mbar l/s
Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-6 mbar l/s
Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-9 mbar l/s
Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-7 mbar l/s
Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-10 mbar l/s
Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-8 mbar l/s
Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-11 mbar l/s
Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-9 mbar l/s
Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-11 mbar l/s
Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-10 mbar l/s
Erweiterungsmodul nutzen (LDS3000, LDS3000 AQ) | 9
Funktion Skalierung
LDS3000 der Leckrate
Leckrate 1 V/Dek.
log.
Leckrate unrelevant
linear
Leckrate 1 V/Dek.
log.
Leckrate unrelevant
linear
Leckrate 1 V/Dek.
log.
Leckrate unrelevant
linear
Leckrate 1 V/Dek.
log.
Leckrate unrelevant
linear
Leckrate 1 V/Dek.
log.
Leckrate unrelevant
linear
Leckrate 1 V/Dek.
log.
Leckrate unrelevant
linear
Leckrate 1 V/Dek.
log.
Leckrate unrelevant
linear
Leckrate 1 V/Dek.
log.
Leckrate unrelevant
linear
Obere Grenze
(10 V = ...)
1E5 mbar l/s
1E-2 mbar l/s
1E4 mbar l/s
1E-3 mbar l/s
1E3 mbar l/s
1E-4 mbar l/s
1E2 mbar l/s
1E-5 mbar l/s
1E1 mbar l/s
1E-6 mbar l/s
1E0 mbar l/s
1E-7 mbar l/s
1E-1 mbar l/s
1E-8 mbar l/s
1E-1 mbar l/s
1E-9 mbar l/s
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