INFICON LDS3000 Originalbetriebsanleitung Seite 95

INFICON
LDS2010 Analog
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LDS3000(AQ)-MSM-Bedienungsanleitung-jiqa54de1-10-(1911)
Funktion LDS2010
Leckrate log. in Pa·m³/s
0 ... 10 V, 1 V/Dekade,
0 V = 1E-12 Pa·m³/s = 1E-12 mbar l/s
Druck p1 log. in Pa
1 V/Dekade, 2.5 ... 8.5 V,
2.5 V = 1E-3 mbar
Leckrate log. in Pa·m³/s
0 ... 10 V, 1 V/Dekade,
0 V = 1E-12 Pa·m3/s = 1E-12 mbar l/s
Druck p2 log. in Pa
1 V/Dekade, 2.5 ... 8.5 V,
2.5 V = 1E-3 mbar
Druck p1 log. in Pa
1 V/Dekade, 2.5 ... 8.5 V,
2.5 V = 1E-3 mbar
Druck p2 log. in Pa
1 V/Dekade, 2.5 ... 8.5 V,
2.5 V = 1E-3 mbar
Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-3 mbar l/s
Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-3 mbar l/s
Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-4 mbar l/s
Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0V = 1E-4 mbar l/s
Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-5 mbar l/s
Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-5 mbar l/s
Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-6 mbar l/s
Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-6 mbar l/s
Erweiterungsmodul nutzen (LDS3000, LDS3000 AQ) | 9
Funktion Skalierung
LDS3000 der Leckrate
Leckrate 1 V/Dek.
log.
p1 1 V/ unrelevant
Dek.
Leckrate 1 V/Dek.
log.
p2 1 V/ unrelevant
Dek.
p1 1 V/ unrelevant
Dek.
p2 1 V/ unrelevant
Dek.
Leckrate 2 V/Dek.
log.
Leckrate Spezial 1
log.
Leckrate 2 V/Dek.
log.
Leckrate Spezial 1
log.
Leckrate 2 V/Dek.
log.
Leckrate Spezial 1
log.
Leckrate 2 V/Dek.
log.
Leckrate Spezial 1
log.
Obere Grenze
(10 V = ...)
1E-2 mbar l/s
unrelevant
1E-2 mbar l/s
unrelevant
unrelevant
unrelevant
1E+2 mbar l/s
1E+1 mbar l/s
1E+1 mbar l/s
1E+0 mbar l/s
1E0 mbar l/s
1E-1 mbar l/s
1E-1 mbar l/s
1E-2 mbar l/s
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