INFICON LDS3000 Betriebsanleitung Seite 54

21 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-1 mbar l/s
21 2 Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-4 mbar l/s
22 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-2 mbar l/s
22 2 Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-5 mbar l/s
23 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-3 mbar l/s
23 2 Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-6 mbar l/s
24 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-4 mbar l/s
24 2 Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-7 mbar l/s
25 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-5 mbar l/s
25 2 Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-8 mbar l/s
26 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-6 mbar l/s
26 2 Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-9 mbar l/s
27 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-7 mbar l/s
27 2 Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-10 mbar l/s
28 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-8 mbar l/s
28 2 Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-11 mbar l/s
29 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-9 mbar l/s
29 2 Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-11 mbar l/s
30 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-10 mbar l/s
30 2 Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-11 mbar l/s
54
Betrieb
Leckrate linear unrelevant 1E0 mbar l/s
Leckrate log. 1 V/Dek.
Leckrate linear unrelevant 1E-1 mbar l/s
Leckrate log. 1 V/Dek.
Leckrate linear unrelevant 1E-2 mbar l/s
Leckrate log. 1 V/Dek.
Leckrate linear unrelevant 1E-3 mbar l/s
Leckrate log. 1 V/Dek.
Leckrate linear unrelevant 1E-4 mbar l/s
Leckrate log. 1 V/Dek.
Leckrate linear unrelevant 1E-5 mbar l/s
Leckrate log. 1 V/Dek.
Leckrate linear unrelevant 1E-6 mbar l/s
Leckrate log. 1 V/Dek.
Leckrate linear unrelevant 1E-7 mbar l/s
Leckrate log. 1 V/Dek.
Leckrate linear unrelevant 1E-8 mbar l/s
Leckrate log. 1 V/Dek.
Leckrate linear unrelevant 1E-9 mbar l/s
Leckrate log. 1 V/Dek.
1E6 mbar l/s
1E5 mbar l/s
1E4 mbar l/s
1E3 mbar l/s
1E2 mbar l/s
1E1 mbar l/s
1E0 mbar l/s
1E-1 mbar l/s
1E-1 mbar l/s
1E-1 mbar l/s