Gasbezeichnung
Monogerman (GeH
)
4
Selenwasserstoff (H
Se)
2
Hydride (Forts.)
Schwefelwasserstoff (H
S)
2
Schwefelwasserstoff (H
S) trocken
2
Schwefelwasserstoff (H
S) geringe
2
Konz.
Phosphin (PH
)
3
Silan (SiH
)
4
Stibin (SbH
)
3
Tert-Butylarsin (TBA)
Tert-Butylphosphin (TBP)
Cyanwasserstoff (HCN)
Schwefelwasserstoff (H
S)
2
Schwefelwasserstoff (H
S) geringe
2
Konz.
Mineralsäuren
Bortrifluorid (BF
) geringe Konz.
3
Bortrifluorid XP (BF
)
3
Bortrifluorid XP (BF
) geringe Konz.
3
Bromwasserstoff (HBr)
Bromwasserstoff XP (HBr)
Bromwasserstoff XP (HBr) geringe
Konz.
Chlorwasserstoff (HCl)
Chlorwasserstoff (HCl) geringe
Konz.
Chlorwasserstoff XP (HCl)
Chlorwasserstoff XP (HCl) geringe
Konz.
Fluorwasserstoff (HF)
Technisches Handbuch SPM
GW
Standard
(Grenzwert)
Alarmschwelle 1
1
200 ppb
200 ppb
50 ppb
25 ppb
10 ppm
5,1 ppm
10 ppm
5,1 ppm
10 ppm
4 ppb
300 ppb
150 ppb
5 ppm
2,5 ppm
100 ppb
50 ppb
0,01 mg/m
25 ppb
3
150 ppb
4,7 ppm
2,4 ppm
10 ppm
5 ppm
10 ppm
3
1 ppm
502 ppb
1 ppm
0,5 ppm
1000 ppb
502 ppb
2 ppm
1,0 ppm
2 ppm
1,0 ppm
2000 ppb
251 ppb
2 ppm
1 ppm
2 ppm
120 ppb
2 ppm
1,0 ppm
2000 ppb
101 ppb
0,5 ppm
1,0 ppm
SPM Single Point Monitor
Standard
Probenahmedauer
Alarmschwelle 2
(Sek.)
1
400 ppb
240
50 ppb
60
10 ppm
10
10 ppm
10
80 ppb
900
300 ppb
15
5 ppm
30
100 ppb
30
50 ppb
90
300 ppb
120
4,7 ppm
10
10 ppm
10
3
900
749 ppb
240
1,0 ppm
60
769 ppb
120
2,0 ppm
15
2,0 ppm
30
502 ppb
120
2 ppm
10
240 ppb
240
2,0 ppm
15
200 ppb
240
2,0 ppm
30
4-10
Chemcassette
-Teilenummer
®
SP
EP
XPS
1740-9300
705502
700300
1740-9300
1740-9300
1740-9300
1740-9300
705502
700300
1740-9300
705502
700300
1740-9300
705502
700300
705502
700300
1740-9300
705502
700300
1740-9300
704510
701012
700304
701012
700304
705505
700337
1750-9310
1750-9310
705505
700337
1750-9310
1750-9310
705505
700337
705505
700337
1750-9310
1750-9310
705505
700337
2