Ablauf-Diagramm Kombinierte Messung (Getriggerte Fokusmessung Und Leistungsmessung) - primes FocusParameterMonitor FPM 60 Originalbetriebsanleitung

12.3

Ablauf-Diagramm kombinierte Messung (getriggerte Fokusmessung und Leistungsmessung)

t0
do open shutter = 1 (259.1)
t1
do open shutter = 0 (259.1)
t2
command: start = 1 (259.0)
t3
t4
command: start = 0 (259.0)
t5
t6
measurement finished = 0?
t7
command: Setup or Measurement
80
Start
PMM status:
shutter is closed?
(285.1)
command:
PMM status:
shutter is open?
(285.0)
Command:
PMM status:
idle = 0? (284.4)?
acknowledge = 1?
(284.6)
PMM status:
acknowledge = 0?
(284.6)
PMM status:
(284.2)
ready = 1? (284.0
mode (256 - 257))
A
FocusParameterMonitor FPM
A
t8
Command: start = 1 (256.4)
FPM status:
idle = 0? (282.4)?
t9
acknowledge = 1? (282.6)
finished = 0? (282.2)
t10
Command: start = 0 (256.4)
FPM status:
t11
acknowledge = 0? (282.6)
measurement running = 1?
(282.1)
t12
FPM status:
t13
ready for measurement = 1?
(282.0)
t14
Laser ON
B
Revision 07 DE 10/2022