INFICON LDS3000 Betriebsanleitung Seite 63

INFICON
LDS2010 Analog Funktion LDS2010
Einstell. Aus-
Menü- gang
punkt 22 Kanal
16 2 Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-9 mbar l/s
17 1 Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-10 mbar l/s
17 2 Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-10 mbar l/s
18 1 Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-11 mbar l/s
18 2 Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-11 mbar l/s
20 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1 mbar l/s
20 2 Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-3 mbar l/s
21 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-1 mbar l/s
21 2 Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-4 mbar l/s
22 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-2 mbar l/s
22 2 Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-5 mbar l/s
23 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-3 mbar l/s
23 2 Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-6 mbar l/s
24 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-4 mbar l/s
24 2 Leckrate log. in mbar l/s
0 ... 4 V, 1 V/Dekade, 0 V = 1E-7 mbar l/s
25 1 Leckrate lin. in mbar l/s
0 ... 10 V, 1 V = 1E-5 mbar l/s
LDS3000 jiqa54de-05-(1604)
Funktion Skalierung der
LDS3000 Leckrate
Leckrate Spezial 1
log.
Leckrate 2 V/Dek.
log.
Leckrate Spezial 1
log.
Leckrate 2 V/Dek.
log.
Leckrate Spezial 1
log.
Leckrate li- unrelevant
near
Leckrate 1 V/Dek.
log.
Leckrate li- unrelevant
near
Leckrate 1 V/Dek.
log.
Leckrate li- unrelevant
near
Leckrate 1 V/Dek.
log.
Leckrate li- unrelevant
near
Leckrate 1 V/Dek.
log.
Leckrate li- unrelevant
near
Leckrate 1 V/Dek.
log.
Leckrate li- unrelevant
near
Betrieb LDS3000 | 6
Obere Grenze
(10 V = ...)
1E-5 mbar l/s
1E-5 mbar l/s
1E-6 mbar l/s
1E-6 mbar l/s
1E-7 mbar l/s
1E1 mbar l/s
1E7 mbar l/s
1E0 mbar l/s
1E6 mbar l/s
1E-1 mbar l/s
1E5 mbar l/s
1E-2 mbar l/s
1E4 mbar l/s
1E-3 mbar l/s
1E3 mbar l/s
1E-4 mbar l/s
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