INFICON LDS3000 Betriebsanleitung Seite 62

6 | Betrieb LDS3000
LDS2010 Analog Funktion LDS2010
Einstell. Aus-
Menü- gang
punkt 22 Kanal
8 2 Druck p2 log. in Pa
1 V/Dekade, 2.5 ... 8.5 V, 2.5 V = 1E-3 mbar
9 1 Druck p1 log. in Pa
1 V/Dekade, 2.5 ... 8.5 V, 2.5 V = 1E-3 mbar
9 2 Druck p2 log. in Pa
1 V/Dekade, 2.5 ... 8.5 V, 2.5 V = 1E-3 mbar
10 1 Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-3 mbar l/s
10 2 Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-3 mbar l/s
11 1 Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-4 mbar l/s
11 2 Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0V = 1E-4 mbar l/s
12 1 Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-5 mbar l/s
12 2 Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-5 mbar l/s
13 1 Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-6 mbar l/s
13 2 Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-6 mbar l/s
14 1 Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-7 mbar l/s
14 2 Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-7 mbar l/s
15 1 Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-8 mbar l/s
15 2 Leckrate log. in mbar l/s
0 ... 10 V, 3 V/Dekade, 0 V = 1E-8 mbar l/s
16 1 Leckrate log. in mbar l/s
0 ... 8 V, 2 V/Dekade, 0 V = 1E-9 mbar l/s
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Funktion Skalierung der
LDS3000 Leckrate
p2 1 V/ unrelevant
Dek.
p1 1 V/ unrelevant
Dek.
p2 1 V/ unrelevant
Dek.
Leckrate 2 V/Dek.
log.
Leckrate Spezial 1
log.
Leckrate 2 V/Dek.
log.
Leckrate Spezial 1
log.
Leckrate 2 V/Dek.
log.
Leckrate Spezial 1
log.
Leckrate 2 V/Dek.
log.
Leckrate Spezial 1
log.
Leckrate 2 V/Dek.
log.
Leckrate Spezial 1
log.
Leckrate 2 V/Dek.
log.
Leckrate Spezial 1
log.
Leckrate 2 V/Dek.
log.
LDS3000 jiqa54de-05-(1604)
INFICON
Obere Grenze
(10 V = ...)
unrelevant
unrelevant
unrelevant
1E+2 mbar l/s
1E+1 mbar l/s
1E+1 mbar l/s
1E+0 mbar l/s
1E0 mbar l/s
1E-1 mbar l/s
1E-1 mbar l/s
1E-2 mbar l/s
1E-2 mbar l/s
1E-3 mbar l/s
1E-3 mbar l/s
1E-4 mbar l/s
1E-4 mbar l/s