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Technische Daten
Interferenzgas
Kohlenmonoxid
Chlor
Diboran
Ethylen
Ethylalkohol
Ethylenoxid
Ether
Fluor
Freon 12
German
Hexan
Wasserstoff
Chlorwasserstoff
Blausäure
Fluorwasserstoff
Schwefelwasser-
stoff
MEK
Mercaptan [Methyl] 5
Methan
Stickstoffoxid
Stickstoffoxid
Phosphin
Silan
Schwefeldioxid
Trichlorethylen
k.A. = keine Angaben
90
Konzentration
GeH
[ppm]
100
0
5
k.A.
20
5
50
1
100
k.A.
10
k.A.
400
k.A.
5
k.A.
1000
0
1
1
500
k.A.
500
0
50
k.A.
10
k.A.
10
k.A.
10
k.A.
200
k.A.
k.A.
5000
k.A.
100
k.A.
5
0.5
0.5
1
5
0.2
10
3
1000
k.A.
ULTIMA XL/ULTIMA XT
B
H
Br
F
3
2
6
2
2
0
0
0
k.A.
4
10
20
0
0
2
0
0
k.A.
0
0
k.A.
k.A. k.A. k.A.
k.A.
0
0
k.A.
2
5
0
0
0
5
0
0
k.A.
0
0
0
0
0
k.A.
0
0
k.A.
0
0
k.A.
0
0
k.A.
0
-0.2 0.5
k.A.
0
0
k.A.
0
-0.2 k.A.
k.A.
0
0
k.A.
0
0
k.A.
0.4 1
3
0
0
15
0
0
6
0
0
k.A.
k.A. 0
MSA
NH
NH
EtO
3
2
0
2
k.A.
0
0
0
k.A.
k.A.
k.A.
0
40
k.A.
k.A.
k.A.
0
k.A.
10
k.A.
k.A.
k.A.
k.A.
k.A.
k.A.
0
0
0
k.A.
k.A.
k.A.
k.A.
k.A.
k.A.
k.A.
500
0
0
0
k.A.
0
3
0
k.A.
k.A.
k.A.
1
k.A.
0
k.A.
3
k.A.
k.A.
k.A.
k.A.
k.A.
0
3
k.A.
k.A.
k.A.
0
0
0
0
k.A.
k.A.
k.A.
0
0
k.A.
k.A.
k.A.
k.A.
DE
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