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FocusParameterMonitor FPM
FPM status:
measurement running = 0?
t15
ready for measurement =
0? (282.0)
Laser OFF
FPM status:
t16
measurement finished =
1? (282.2)
idle = 1? (282.4)
FPM status:
measurement failure
measured parameters (FPM)
(304 - 35Z FPM
352- 375 FPM mit
352 - 384 FPM neu)
Abb. 12.7:
Ablauf-Diagramm kombinierte Messung
Revision 08 DE - 12/2023
(282.1)
= 0?
(282.3)
measurement failures (FPM)
(288 - 302)
B
t17
measurement running =
irradiation time
t18
FPM Command:
do close shutter = 1 (259.2)
shutter is closed
t19
FPM Command:
do close shutter = 0
t20
measurement running = 0?
t21
measurement finished =
idle = 1? (284.4)
measured parameters (FPM)
(352 - 391 FPM PROFIBUS)
(376 - 415 FPM PROFINET)
(384 - 423 FPM PROFINET M12)
End
≈
FPM status:
ready = 0?
(284.0)?
FPM status:
1? (284.1)
> 1s
FPM status
= 1?
(285.1)s
(259.2)
thermal time
>11s?
(xxx.x)s
FPM status:
(284.1)
1? (284.2)
77
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