Technical Specification - Agilent Technologies Turbo-V 1K-G Bedienungshandbuch

Technical Specification

Tab. 2
Pumping speed (without inlet
screen)
Compression ratio
Base pressure
with recommended forepump
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended forepump
Operating position
Operating ambient temperature
Bakeout temperature
Vibration level (displacement)
Lubricant
Cooling requirements
Coolant water
Turbo-V 1K-G Retrofit User Manual / 87-900-996-01 (B)

Technical Specification

Ar:
N :
2
He:
H :
2
Ar:
N
2:
He:
H :
2
Technical Information
Technical Specification
ISO 160:
750 l/s
810 l/s
950 l/s
680 l/s
>5 x 10
8
>1 x 10
8
1 x 10
5
2 x 10
4
< 1 x 10 mbar
-10
(According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump)
ISO 160, ISO 200
KF 25 NW (ISO 160 inlet flange)
KF 40 NW (ISO 200 inlet flange)
45660 rpm
< 5 minutes
ISO 160: >20 m /h (TriScroll 600, DS 602, HS 452,
3
HS 652)
ISO 200: >36 m /h
3
Any
+5 °C to +35 °C
80 °C at inlet flange max.(ISO flange)
< 0.01 µm at inlet flange
permanent lubrication
Water
Minimum flow: 200 l/h (0.89 GPM)
Temperature: +10 °C to +30 °C
Pressure: 3 to 5 bar (45 to 75 psi)
17
ISO 200:
1040 l/s
1080 l/s
1150 l/s
730 l/s
243/294