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The pump can be water cooled or air cooled: in the
first case the customer can use the dedicated
channels on the pump body, in the second case
an external optional fan is available.
A thermistor sensor is mounted near the upper
bearing to prevent the pump from overheating.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01 μm.
The pump can operate in any position and can be
supported on the high vacuum flange. The con-
nection of the forevacuum on the side of the pump
is a KF 16 NW flange (KF25 – optional).
PUMP
CONNECTOR
CONTROLLER
Controller Description
The dedicated controller is a solid-state frequency
converter which is driven by a single chip micro-
computer and is composed of two PCBs which in-
clude power supply and 3-phase output, analog
and input/output section, microprocessor and digi-
tal section.
The power supply, together with the 3-phase out-
put, converts the single phase AC mains supply
into a 3-phase, low voltage, medium frequency
output which is required to power the pump.
The controller can be operated by a remote host
computer via the serial connection. A Windows-
based software is available (optional).
TECHNICAL SPECIFICATION
Pumping speed
With CFF 8" or
ISO 160:
N
: 280 l/s
2
He: 230 l/s
H
: 210 l/s
2
Compression ratio
Base pressure *
mechanical:
(with recommended
< 2 x 10
forepump)
Inlet flange
CFF 8" O.D.
CFF 6" O.D.
Foreline flange
KF16 NW (KF25 – optional)
Rotational speed
56000 RPM
Start-up time
< 3 minutes
CABLE
With CFF 6" or
ISO 100:
N
: 250 l/s
2
He: 220 l/s
H
: 200 l/s
2
8
N
: >2 x 10
2
5
He: 1 x 10
4
H
: 2 x 10
2
-10
-10
mbar (< 1.5 x 10
Torr)
ISO 160
ISO 100
Recommended
forepump
Operating position
Cooling
requirements
Operating ambient
temperature
Coolant water
Bakeout temperature
Vibration level
(displacement)
Noise level
Pwr supply (mains):
Input voltage:
Input freq.:
Max input pwr:
Stand-by pwr:
Max oper. power:
Protection fuse
Pwr supply (24 Vdc):
Input voltage:
Max input pwr:
Stand-by pwr:
Max oper. power:
Protection fuse
Compliance with:
Power cable
Serial communica-
tion (Navigator kit)
Storage temperature
Input
Lubricant
Installation category
Pollution degree
Storage temperature
Weight kg (lbs):
Kit:
Controller:
* (According to standard DIN 28 428, the base pressure is that
measured in a leak-free test dome, 48 hours after the comple-
tion of test dome bake-out, with a Turbopump fitted with a Con-
Flat flange and using the recommended pre-vacuum pump).
70/90
TECHNICAL INFORMATION
mechanical: Varian DS 102
mechanical: Varian DS 302
dry pump: Varian SH 110
any
Natural air convection
Forced air or water optional
+ 5° C to + 35° C
flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 5 bar (45 to 75 Psi)
120° C at inlet flange max. (CF flange)
80° C at inlet flange max. (ISO flange)
< 0.01 μm at inlet flange
≤ 45 dB (A) at 1 meter
100 - 240 Vac
50 - 60 Hz
300 VA
10 W
150 W with water or air cooling
4 A
24 Vdc
200 W
10 W
150 W with water or air cooling
8 A
UNI EN 292-1
UNI EN 292-2
EN-CENELEC 55011
IEC 1000-4-2 (ex 801-2)
IEC 1000-4-3 (ex 801-3)
IEC 1000-4-4 (ex 801-4)
EN 61010-1 (IEC 1010-1)
EN 1012-2
With European or NEMA plug
3 meters long (optional)
RS232 cable with a 9-pin D type
male connector and a 9-pin D type
female connector, and Navigator
software (optional)
-20° C to +70° C
75 Vac, three phase, 963 Hz
permanent lubrication
II
2
- 20° C to + 70° C
ISO 100 and 160: 4.5 (10)
CFF 6" and 8": 8 (17.6)
1 (2.2)
87-900-946-01(H)
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