Technical Specification - Agilent Technologies TwisTorr 704 FS serie Bedienungshandbuch

Technical Specification

Tab. 5 Technical Specification
Pumping speed (■)
N 660 l/s
2
He 640 l/s
H 480 l/s
2
Ar 625 l/s
Max gas throughput (**) (■)
N
2
Ar
Compression ratio (■)
N >1E+11
2
He 2E+08
H 3E+06
2
Ar >1E+11
Foreline Tolerance (*)
N 10 mbar
2
He 10 mbar
H > 4 mbar
2
Ar 8.5 mbar
Base pressure with mechanical
recommended forepump
Max gas throughput:
(**)
• water cooling (ambient temperature= 25 °C; water temperature = 15 °C; backing pump 11.6
m /h)
3
• air cooling (ambient temperature= 25 °C; backing pump 11.6 m
Foreline tolerance defined to satisfy following criteria:
(*)
• the Turbopump still produces a compression of 100
• the rotational frequency is not below the low speed of the pump (values measured in water
cooling mode)
TwisTorr 704 FS User Manual / 87-901-051-01 (A)
Air cooling
4.3 mbar l/s - 255 SCCM
1.5 mbar l/s - 88 SCCM
< 3.5 x 10 mbar
-10
(< 2.6 x 10 Torr)
-10
(According to standard DIN 28 428, the base pressure is
that measured in a leak-free test dome, 48 hours after the
completion of test dome bake-out, with a Turbopump fitted
with a ConFlat flange and using the recommended pre-
vacuum pump)
Technical Information

Technical Specification

Water cooling
6.1 mbar l/s - 365 SCCM
3.3 mbar l/s - 195 SCCM
/h)
3
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