Technical Specification - Agilent Technologies TwisTorr304 FS X3500-64000 Bedienungshandbuch

17 Technical Information

Technical Specification

Technical Specification

Max gas throughput:
•
water cooling (water temperature=25°C; backing pump 5 m
o
air cooling (ambient temperature 25°C; backing pump 5 m
o
Tab. 3 Technical Specification
Pumping speed
N
2
He
H
2
Ar
Max gas throughput at full rotational speed
(with recommended forepump)
N
2
Ar
Compression ratio
N
2
He
H
2
Ar
Base pressure with recommended forepump
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended forepump
252/309
ISO 100 / CF 6"
250 l/s
255 l/s
220 l/s
250 l/s
Air cooling
170 sccm
110 sccm
>1 × 10
11
>1 × 10
8
1.5 × 10
6
> 1 × 10
11
< 1 x 10 mbar
-10
(< 1 x 10 Torr)
-10
(According to standard DIN 28 428, the base pressure is
that measured in a leak-free test dome, 48 hours after the
completion of test dome bake-out, with a Turbopump fitted
with a ConFlat flange and using the recommended pre-
vacuum pump)
CFF 8" O.D. ISO 160
CFF 6" O.D. ISO 100
KF16 NW (KF25 – optional)
60000 rpm (1010 Hz driving frequency)
< 3 minutes
mechanical: Agilent DS 102
mechanical: Agilent DS 302
dry pump: Agilent SH 110
TwisTorr 304 FS User Manual / 87-901-027-01(A)
/h)
3
/h)
3
ISO 160 / CF 8"
250 l/s
255 l/s
220 l/s
250 l/s
Water cooling
170 sccm
110 sccm