Agilent Technologies TPS-mini 9699180 Bedienungshandbuch Seite 267

Technical Information
Description of the TPS-mini 269
Turbopump Description269
Controller Description 271
Diaphragm Forepump Description
Control Panel Description 271
Technical Specification 273
TPS-mini Outline 275
Inlet Screen Installation
High Vacuum Flange Connection
High Vacuum Flange Connection Configurations
Interconnections 283
Input Power Connector 283
P1 – Vent 283
J5 – Gauge Connector 284
Pressure Display Module
J1 – IN-OUT 288
Signal Description 289
Original Instructions
TPS-mini User Manual
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