Agilent Technologies TPS-mini 9699180 Bedienungshandbuch Seite 261

Use
This paragraph details the fundamental operating procedures.
Make all electrical an pneumatic connections before the use of the
system.
While heating the vacuum chamber, the temperature of the inlet
flange must not exceed 120 °C with ConFlat flanging and 80 °C with
ISO flanging.
WARNING! Never use the turbopump when the inlet flange is not connected to the
vacuum chamber or is not blanked.
WARNING!
Do not touch the turbopump or any of its accessories during the heating
process. The high temperatures may cause burns.
WARNING! Avoid impacts or harsh movements of the pump when in operation. The
bearings may become damaged and damages to the persons or the things
could be taken place.
TPS-mini User Manual / 87-901-003-01 (E)
Instructions for Use
Use
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