Agilent Technologies TPS-mini 9699180 Bedienungshandbuch Seite 11

TPS-mini User Manual / 87-901-003-01 (E)
Splošne informacije 237
Shranjevanje 240
Priprava za montažo 240
Montaža 242
Uporaba 245
Vzdrževanje 248
Odlaganje opadkov 249
Instructions for Use 251
Safety Guideline for Turbomolecular Pumps 252
General Information 253
Storage 256
Preparation for installation 256
Installation 257
Use 261
Maintenance 264
Disposal 265
Technical Information 267
Description of the TPS-mini 269
Turbopump Description 269
Technical Specification 273
TPS-mini Outline
Inlet Screen Installation 278
275
Contents
11/318