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Radiation Danger; Danger Of Poisoning - SUSS MicroTec MJB4 Sicherheit Und Installation

Labor mask aligner
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Danger!
Do not open the machine until the whole
machine has been isolated from the
power supply!
Pay attention to this warning symbol on
covers!
Where applicable, observe local "log
out - tag out" regulations!
The individual electrical assemblies, especially bal-
lasts CIC1200, CPC200 and CPC350, contain no
parts which the user could repair or adjust.

1.5.4. Radiation Danger

The high luminous density of the exposure lamp can
cause eye damage.
In particular, the invisible ultraviolet component of the
light can lead to permanent eye damage or skin
burns.
Warning!
UV light can permanently damage your
eyes.
Covers over the ray path may not be re-
moved while the UV lamp is switched
on!
Lamp adjustment work may only be car-
ried out with UV-protective goggles -
also with skin protection in the case of
intensive radiation!
Light measurements on the exposure
chuck also require the use of UV-protec-
tive goggles.
UV-protective goggles must carry a marking indicat-
ing the protection class. The color of the goggles
provides no indication of their protective effect!

1.5.5. Danger of Poisoning

1.5.5.1. Mercury Fumes following Lamp
Breakage
The biggest danger following a lamp explosion or
lamp breakage lies in the inhalation of the toxic mer-
cury fumes. Mercury can cause acute and chronic
poisoning.
SAFETY-INST MJB4 Rev09 17-03 WARNINGS and SAFETY PRECAUTIONS
WARNINGS
SAFETY PRECAUTIONS
AND
Note:
The EU safety data sheets can be found in the
Appendix and must be read.
Advice on minimizing health risks following a lamp
explosion:
Leave the lamp house exhaust switched on (with
powerful lamps)!
Leave the contaminated room immediately!
Ventilate the room well for at least 30 minutes!
Do not open the lamp house for the time being.
Allow the interior of the lamp house to cool down
for at least 1 hour!
Carry out lamp house decontamination using an
appropriate decontamination agent (see section
on changing the exposure lamp)!
Follow the general and national safety regula-
tions relating to Hg!
A doctor should be consulted immediately if there
is a possibility of mercury fumes having been in-
haled!
1.5.5.2. Generation of Ozone during the
Operation of the Lamp
Short-wavelength ultraviolet light can ionize the at-
mospheric oxygen.
An exposure lamp therefore generates ozone during
operation.
Long-term and intensive exposure to ozone can lead
to damage to the respiratory organs.
Warning!
Where powerful lamps or special lamps
for deep-UV are used, additional extrac-
tion and controlled cooling by means of
nitrogen flushing should be ensured
(see setting tables)!
If the stipulated settings are applied correctly, the
ozone concentration in the area surrounding the
lamp house should remain well below the permissi-
ble limit.
- Original Documentation -
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