Preparing The Machine For Working - SUSS MicroTec MJB4 Sicherheit Und Installation

Pay attention to the correct handling of different
lamp mountings (depending on the lamp house
type) - see Servicing section in the manual!
Connect the connection contacts on the lamp in
such a way that electrical contact resistances are
minimized. Replace all components which show
traces of corrosion or overheating!
1.6.1.3. Setting Regulations for Lamp
Cooling
The UV-exposure lamps must be cooled in a con-
trolled way in order to maintain safe and optimum
operating conditions. The cooling should be set up
individually according to the lamp type.
Detailed values for the lamp cooling and the vol-
ume flow which needs to be extracted for differ-
ent lamps can be found in the table "Setting
values for lamp cooling and lamp house extrac-
tion" in section 2.1. "Prerequisites for Installa-
tion".
The basic components of the cooling are:
• Blowing of nitrogen onto the metallic lamp cap
(but never the glass tube),
• Blowing of compressed air into a heat sink (for ra-
diation of heat) in the lamp house.
The lamp-specific values both for the adjustment of
the blowing of nitrogen onto the upper and lower
lamp caps and also for the extraction should be ob-
served.
Significant deviations from the setting values endan-
ger your safety!
Minor deviations affect the operating safety of the
lamp and machine.
If a lamp frequently illuminates in an unstable man-
ner, or of the life of the lamp has systematically de-
teriorated, carefully check the settings for the lamp
cooling. Frequently, the cause of such problems lies
in incorrect setting of these data or in incorrect fixing
of the connections. If you are not sure, call in SUSS
MicroTec's service to carry out a check!
Note!
In addition, in order to achieve good exposure
results, the evenness of the light should be ad-
justed after fitting a new lamp.
SAFETY-INST MJB4 Rev09 17-03 WARNINGS and SAFETY PRECAUTIONS
WARNINGS SAFETY PRECAUTIONS
AND
1.6.1.4. Lamp Housing Extraction
As a rule, no suction is required for 200W and 350W
lamps.
Ozone extraction from the lamp housing must be en-
sured for the 500W DUV Hg/Xe lamp in the 350W
lamp housing to avoid health risk. Add-on kit item no.
189553 is required for this purpose.
Detailed values can be found in the table "Set-
ting values for lamp cooling and lamp house ex-
traction" in section 2.1. "Prerequisites for
Installation".
1.6.1.5. Disposal
Used lamps should also only be stored and trans-
ported in the original protective packaging!
UV high-pressure lamps contain up to 1g of highly-
toxic mercury.
These lamps should therefore be treated as special-
category waste.
Local regulations on disposal should be observed.
It is possible to return the lamps to the supplier or
manufacturer.
1.6.2. Preparing the Machine for
Working
Check that the vibration-insulated table (if present)
is working.
Caution!
In the event of a loss of pressure, the ta-
ble can drop and trap your fingers!
1.6.2.1. Preparing to Switch ON
The following instructions assume that the mask
aligner has been correctly installed and that the ma-
chine has been connected to the power supply net-
work by switching on the main power switch.
The following pressure values should be present on
the machine:
• Compressed air
5,5 - 7 bar (COMPRESSED AIR)
- Original Documentation -
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