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Transportation Locks - SUSS MicroTec MJB4 Sicherheit Und Installation

Labor mask aligner
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2.2.5. Transportation Locks

The following transportation locks must be removed
before commissioning the machine.
Alignment Stage
Unscrew and remove screws 1 (2x) and remove
plastic plate.
Unscrew and remove screws 2 (two of them were
hidden from the plastic plate) (3x)
Unscrew and remove screws 3 (2x)
Open the mask holder clamping and remove the
transport lock.
5
2
3
Alignment Stage
1 Screw 1 (2x)
2 Screw 2 (3x)
3 Screw 3 (2x)
4 Plastic plate
5 Transport lock (marked red)
SAFETY-INST MJB4 Rev09 17-03 INSTALLATION AND TRANSPORT
TSA Microscope Manipulator
4
1
TSA Microscope Manipulator
INSTALLATION AND TRANSPORT
Remove screws 1 and 2.
Screw 1 secures the microscope stroke, and
screw 2 secures the X-Y adjustment on the ma-
nipulator.
1
1 Screw 1
2 Screw 2
- Original Documentation -
2
2
17

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