Taking The Machine Out Of Service - SUSS MicroTec MJB4 Sicherheit Und Installation

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INSTALLATION AND TRANSPORT
2.2.6. Taking the Machine out of
Service
Before shutting down the machine for a longer
period of time, you must be advised by a SUSS
MicroTec service technician.
We strongly recommend the following before long-
term decommissioning:
• Perform maintenance on all mechanically moved
parts
• Cover the machine with a dust-tight cover
• Add sufficient drying agent inside the cover.
Special safety precautions must be taken to protect
the Mask Aligner from damage before it can be
transported.
The machine must be transported and installed by a
SUSS MicroTec service technician or person
authorized by SUSS MicroTec.
Users who transport the machine without a SUSS
MicroTec service technician or a person authorized
by SUSS MicroTec do so at their own risk.
The following minimum requirements must be
fulfilled to prepare the machine for transportation:
• Exposure lamp and exposure optics
• All transport safeguards provided are attached
and/or activated 
(adjusting table, TSA microscope manipulator,
lamp housing)
• Machine is covered with a dust-tight cover
The previous sections must be observed for actual
transportation.
If you anticipate
temperature fluctuations, additional special safety
precautions are required!
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- Original Documentation -
strong vibrations or
SAFETY-INST MJB4 Rev09 17-03 INSTALLATION AND TRANSPORT
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