SUSS MicroTec MJB4 Sicherheit Und Installation Seite 17

Table 1: Settings for Lamp Cooling and Lamp Housing Extraction
Exposure lamp [W]
Nitrogen 
[bar]
Main pressure
Nitrogen lower [l/min]
lamp base
Nitrogen upper [l/min]
lamp base
Nitrogen 
[l/h]
Shutter
Diameter of [mm]
exhaust on
bottom
Notes
Lamps that can be used:
• HBO 200 W/DC - PN: G191806
(additional lamp adapter required, item no.:
G189336)
• HBO 350 W-S - PN: G146 049
• USH 350 DS - PN: G182 538
UXM 501 MD - PN: G148 979
(additional lamp adapter required, item no.:
G202485)
SAFETY-INST MJB4 Rev09 17-03 INSTALLATION AND TRANSPORT
200 350
Osram Osram
1.5 1.5
2.0 3.0
- -
260 260
closed closed
reduced
DUV+Ozone
INSTALLATION AND TRANSPORT
350 500
Ushio Ushio
1.5 1.5
3.0 4.7
(distributed
to both,
upper and
lower lamp
base)
-
260 260
closed 100 required
for DUV appl.
REVERSED
polarity!
- Original Documentation -
Notes
± 0,5 bar
Must be set by
service technician.
Adjustment by 1/
FM1-B10
Must be set by
service technician
needs adapter tube
outlet temp.< 60°C
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