Working With The Mjb4 Mask Aligner; Fitting, Changing And Cooling The Exposure Lamp; Changing The Lamp - SUSS MicroTec MJB4 Sicherheit Und Installation

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WARNINGS
AND
1.6. Working with the MJB4
Mask Aligner
Only SUSS MicroTec employees or qualified and
trained staff may service the machine.
Danger!
The operating and starting voltages in
high-pressure lamps are deadly danger-
ous!
The machine must be switched off be-
fore beginning servicing work on the
lamp house or other electrical compo-
nents!
1.6.1. Fitting, Changing and Cool-
ing the Exposure Lamp
When working with high-pressure lamps, the appro-
priate safety regulations and service life specifica-
tions of the lamp manufacturer must be observed.
Hg-filled UV high-pressure lamps must be changed
once the service life specified by the manufacturer
has expired. There is an increased risk of lamp ex-
plosion after this date!
Premature failure of a lamp can be the result of in-
correct lamp cooling (too powerful or too weak), in-
correct power setting, soiling of the lamp tube or
similar.
Exposure lamps should only be handled with gloves.
Clean any grease marks with alcohol!
1.6.1.1. Danger of Lamp Explosion
If the Hg high-pressure lamps are operated accord-
ing to their specification (type selection on CIC, cool-
ing, min/max power, service life), lamp explosions
during operation are extremely rare.
The exposure lamp should always be protected
against shock when handling - the lamps should al-
ways be stored and transported in their original
packaging!
Any other mechanical stress such as bending or
twisting during installation should also be carefully
avoided!
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- Original Documentation -
SAFETY PRECAUTIONS
SAFETY-INST MJB4 Rev09 17-03 WARNINGS and SAFETY PRECAUTIONS
Warning!
The exposure lamp is under high pres-
sure.
Mechanical face and eye protection
should be worn when handling a high-
pressure lamp!
If the lamp breaks, do not touch the
components with the hand and do not
inhale the Hg fumes!
Use a breathing mask with gas absorp-
tion during decontamination!
In the event of a lamp explosion, after the immediate
measures described in section Danger of poisoning
an Hg decontamination kit (e.g Mercurisorb) should
be used to eliminate the mercury which is still pres-
ent. Such a kit should always be kept in store. These
can be obtained, for example, from:
Carl Roth GmbH & Co
P.O. Box 100121
D-76231 Karlsruhe
http://www.carl-roth.de

1.6.1.2. Changing the Lamp

Only use lamps of a type approved for use by SUSS
MicroTec Lithography!
Caution!
In almost all exposure lamps, the anode
(positive pole) is at the bottom.
Only the 500W DUV Hg/Xe lamp (Ushio)
position is reversed.
After changing the lamp type or replac-
ing a CIC1200, CPC200 or CPC350 it is
essential to check the correct polarity of
the lamp and correct type selection on
the CIC1200 before switching on the
lamp!
Always follow the lamp manufacturer's directions!
When fitting or removing the lamp, avoid any me-
chanical load acting on the glass tube! Only tighten
the lamp by hand!