SUSS MicroTec MJB4 Sicherheit Und Installation Seite 3

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PREFACE AND PUBLISHING DETAILS
Preface and Publishing Details
Information provided in this document is subject to change without notice.
Although believed to be accurate, SUSS MicroTec assumes no responsibility for any errors, omissions, or
inaccuracies.
SUSS MicroTec also reserves the right to modify the product, substitute components by equivalent or sim-
ilar parts or change functions or controls without notification in the manual or elsewhere.
The product must be installed properly, used as directed and operated by trained and authorized personnel
only. Any use or application deviating from the designated and intended use can cause hazards.
For a description of the designated use see also the section "Intended Use of the Product"
The contents of this product documentation shall not become part of or modify any existing legal agreement
or commitment. All warranty stipulations and obligation by SUSS are contained in the sales contract. Con-
tractual stipulations are neither extended nor limited by this product documentation.
The information included in this manual is SUSS MicroTec Proprietary Information. It is provided for the use
by SUSS MicroTec's customers only and shall not be altered.
Use of the documentation is permitted only for purchasers, authorized users or prospective purchasers of
SUSS MicroTec products. Further distribution, reproduction, sale of this material or disclosing its contents
without the expressed written permission of SUSS MicroTec is prohibited.
©Suss MicroTec Lithography GmbH, All Rights Reserved.
If you have any questions or remarks about this manual, please contact:
SUSS MicroTec Lithography GmbH
Schleißheimer Str. 90
D 85748 Garching
Tel.:+49 89 32007-0
Fax: +49 89 32007-162
www.suss.com
This manual is available in the following formats:
Cleanroom printed and electronic .pdf-format (CD-ROM).
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PUBLISHING DETAILS