SUSS MicroTec MJB4 Sicherheit Und Installation Seite 18

2
INSTALLATION AND TRANSPORT
Table 2: Optical Specification of Exposure Lamps
FUNCTION
Optics
Spectral Ranges
Types
Intensity/ 
Uniformity
200 W Lamp
350 W Lamp
500 W Lamp
12
- Original Documentation -
SPECIFICATION
SUSS Diffraction Reducing Optics
UV400: 350 ...450 nm
UV300: 280....350 nm
UV250: 240....260 nm
UV400
UV400 square
UV300/400
UV300/400 square
UV250
UV250/300/400
Micro Lenses (MO)
UV400, 100 mm round:
44 mW/cm² at 405 nm, Uniformity ± 4%
18 mW/cm² at 365 nm, Uniformity ± 4%
UV400, 100 mm round:
75 mW/cm² at 405 nm, Uniformity ± 3.5%
30 mW/cm² at 365 nm, Uniformity ± 3.5%
UV400, 100 mm square:
90 mW/cm² at 405 nm, Uniformity ± 3.5%
35 mW/cm² at 365 nm, Uniformity ± 3.5%
UV300, 100 mm round:
24 mW/cm² at 320 nm, Uniformity ± 3.5%
MO-UV400, 100 mm round:
65 mW/cm² at 405 nm, Uniformity ± 2.5%
24 mW/cm² at 365 nm, Uniformity ± 2.5%
UV400, 100 mm round:
40 mW/cm² at 405 nm, Uniformity ± 3.5%
25 mW/cm² at 365 nm, Uniformity ± 3.5%
UV300, 100 mm square:
30 mW/cm² at 320 nm, Uniformity ± 3.5%
UV250, 100 mm round:
7.5 mW/cm² at 240 nm, Uniformity ± 5%
MO-UV400, 100 mm round:
36 mW/cm² at 405 nm, Uniformity ± 2.5%
22 mW/cm² at 365 nm, Uniformity ± 2.5%
MO-UV300, 100 mm round:
30 mW/cm² at 320 nm, Uniformity ± 2.5%
MO-UV250, 100 mm round:
7 mW/cm² at 240 nm, Uniformity ± 2.5%
For high resolution
Micro Lenses (MO) 
optics for quick and easy
set of different illumination
angles by exchangeable il-
lumination filter plates (IFP)
Measured with SUSS UV-
Optometer
All values ± 10%
Definition of Uniformity:
max-min
max+min
MO with HR-IFP
(12 holes aperture)
MO with HR-IFP
(12 holes aperture)
SAFETY-INST MJB4 Rev09 17-03 INSTALLATION AND TRANSPORT
REMARKS OPTIONS
Filters:
i-line, g-line, 
h-line, g/h-line
and transmis-
sion reduction