Technical Specification - Agilent Technologies Turbo-V 850 TwisTorr Bedienungshandbuch

17 Technical Information

Technical Specification

Technical Specification

Tab. 4 Technical Specification
Pumping speed
N
2
He
H
2
Ar
Gas throughput at full rotational speed (with
recommended forepump)
N
2
He
Ar
Compression ratio
N
2
He
H
2
Ar
Base pressure with recommended forepump
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended forepump
Operating position
Operating ambient temperature
Relative humidity of air
Bakeout temperature
316/406
ISO 160 / CF 8"
700 l/s
680 l/s
580 l/s
680 l/s
Air cooling (best
conditions)
250 sccm
450 sccm
160 sccm
1 × 10
11
2 × 10
8
2.5 × 10
6
> 1 × 10
11
< 1 x 10 mbar
-10
(< 1 x 10 Torr)
-10
(According to standard DIN 28 428, the base pressure is
that measured in a leak-free test dome, 48 hours after the
completion of test dome bake-out, with a Turbopump fitted
with a ConFlat flange and using the recommended pre-
vacuum pump)
ISO 200 K, CF 10", ISO200 F, ISO 160 K, CF 8", CF 6" (rack
version only), ISO 160 F
KF 25 (KF40 for ISO 200 F inlet flange)
49500 rpm
< 3 minutes (with integrated controller)
DS 302, TriScroll 300
Any
+5 °C to +45 °C
0 – 90 % (not condensing)
80 °C at inlet flange max.
Turbo-V 750/850 TwisTorr User Manual / 87-901-020-01
ISO 200 / CF 10"
750 l/s
690 l/s
590 l/s
700 l/s
Water cooling (best
conditions)
600 sccm
700 sccm
180 sccm
(A)