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Technical Information
Connection of the High Vacuum Flange
Installation of ISO-F Flange
For ISO-F flange connections, fix the two flanges with the screws as
shown in the following figure (a protective screen can optionally be
used).
Figure 76
Use the required number of hex screws:
Tighten the screws with a torque of 25 Nm.
Installation of ConFlat Flange
For ConFlat flange connections, fix the two flanges with the screws
as shown in the following figures (a protective screen can optionally
be used).
384/406
8 for ISO 160 flange
12 for ISO 200 flange
Turbo-V 750/850 TwisTorr User Manual / 87-901-020-01
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