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PIN N.
SIGNAL NAME
1
START/STOP (+)
2
START/STOP (-)
3
INTERLOCK (+)
4
INTERLOCK (-)
5
SPEED SETTING (+)
6
SPEED SETTING (-)
7
SOFT START (+)
8
SOFT START (-)
9
+24 Vdc
10
NORMAL OUTPUT (relay)
V
= 125V
max
11
PROGRAMMABLE SET POINT
12
NORMAL OUTPUT
13
FAULT OUTPUT
14
PROGRAMMABLE ANALOG
SIGNAL (+)
15
•
GROUND
•
PROGRAMMABLE ANALOG
SIGNAL (-)
Signal description
START/STOP: input signal to start or stop the
pump. Without the supplied cover connector the
turbomolecular pump automatically starts, if you
want to stop the turbo-pump from outside, you
have to connect the START/STOP (+) signal to the
+24 Vdc pin and the START/STOP (-) signal to the
GROUND pin (this is the default configuration of
the cover connector).
INTERLOCK: input signal to control the pump ro-
tation. With the supplied cover connector the IN-
TERLOCK (+) signal is connected to the +24 Vdc
pin and the INTERLOCK (-) signal to the
GROUND pin; in this condition the pump is
stopped.
SOFT START: this input is used to provide a "soft
start" to the pump; in this condition the ramp-up
time could be up to 20 min.
SPEED SETTING: PWM input signal to set the
pump speed. The PWM signal characteristics must
be the following:
• frequency: 100 Hz +/-20%
• amplitude: 24 V max
• duty cycle range: from 25% to 75%
• corresponding to a pump speed from 1100Hz
to 1350Hz (see the following diagram).
INPUT/
OUTPUT
IN
IN
IN
IN
IN
IN
IN
IN
I
= 30 mA
OUT
max
OUT
I
= 200 mA
max
OUT
OUT
OUT
OUT
OUT
1400
1350
1300
1250
1200
1150
1100
1050
20
30
PROGRAMMABLE ANALOG SIGNAL: this out-
put signal is a voltage (from 0 to 10 Vdc) propor-
tional to a reference quantity (frequency or power
or Temperature or Pressure) set by the user. The
default setting is the frequency (see the following
example diagram).
1350
1200
1050
900
750
600
450
300
150
0
0
1
2
100
90
80
70
60
50
40
30
20
10
0
0
1
2
100
90
80
70
60
50
40
30
20
10
0
0
1
2
77/84
TECHNICAL INFORMATION
40
50
60
Duty Cycle [%]
Output: Frequency setting
3
4
5
6
7
8
Voltage (V)
Output: Power setting
3
4
5
6
7
8
Voltage (V)
Output: Temperature setting
3
4
5
6
7
8
Voltage (V)
87-901-003-01(A)
70
80
9
10
9
10
9
10
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