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N.
Read/
Data
Description
Write
Type
120
R/W
N
Rotational
frequency
setting (Hz)
122
R/W
L
Set vent
valve on/off
125
R/W
L
Set the vent
valve
operation
126
R/W
N
Vent valve
opening delay
(expressed in
0.2 sec)
147
R/W
N
Vent open
time
See "vent
connector"
paragraph
155
R
N
Power limit
applied
Read the
maximum
allowable
power
157
R/W
N
Gas load
type
Select the
gas load to
the pump
Pressure
161
R/W
N
Reading Con-
nection Factor
Table A1 Ap-
pendix A Eye-
Sys Manual
162
R/W
A
R1 Set Point
Pressure
Valve
Valid if Win.
101 = 4
Format X.X
E. XX
Where X = 0
to 9
s = + or -
163
R/W
N
Pressure unit
of measure
167
R/W
A
Stop speed
reading
Activates /
deactivates
the pump
speed read-
ing after Stop
command
200
R
N
Pump current
in mA dc
201
R
N
Pump volt-
age in Vdc
Admitted
N.
Values
1100 to 1350
202
(default = 1350)
0 = Closed
1 = Open
203
(default = 1)
204
Automatic = 0
(see note 1.)
On command = 1
(see note 2.)
0 to 65535
205
(corresponding to
0 to 13107 sec)
(default = 15)
0 = infinite
1 bit = 0.2 sec
206
1 to 65535
watt
211
216
Ø = N
2
1 = Ar
224
0 to 10
226
0 = 0
10 = 1 = N
2
300
301
302
0 = mBar
1 = Pa
2 = Torr
310
to
0 = disable
347
1 = enable
400
(default = 0)
401
402
404
83/84
TECHNICAL INFORMATION
Read/
Data
Description
Write
Type
R
N
Pump power
in W (pump
current x
pump voltage
R
N
Driving fre-
quency in Hz
R
N
Pump tem-
perature in
°C
R
N
Pump status
R
N
Error code
R
N
Controller
Heatsink
Temperature
(°C)
R
N
Controller Air
Temperature
(°C).
R
A
Pressure
reading
Format = X.X
E XX
R
N
Rotation Fre-
quency (rpm)
R
N
Cycle time in
minutes (ze-
roed by the
reset com-
mand)
R
N
Cycle num-
ber (zeroed
by the reset
command)
R
N
Pump life in
hours (ze-
roed by the
reset com-
mand)
Reserved to Varian service
R
A
CRC
EPROM
(QE)
R
A
Boot CRC
(BL)
R
A
CRC Param.
(PA)
R
A
CRC Pa-
rameter
structure
87-901-003-01(A)
Admitted
Values
0 to 110
(60°C = Thresh-
old Pump
Overtempera-
ture)
Stop = 0
Waiting intlk = 1
Starting = 2
Auto-tuning = 3
Braking = 4
Normal = 5
Fail = 6
Bit description:
see the following
figure
0 to 110
0 to 70
0 to 999999
0 to 9999
0 to 999999
QE8XXXX
(where "XXXX"
are variable)
BL2XXXX
(where "XXXX"
are variable)
PA8XXXX
(where "XXXX"
are variable)
"XXXX"
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