Agilent Technologies Varian TV 1001SEM Bedienungshandbuch Seite 6

VIBRATION ISOLATOR INSTALLATION....................................................................................83
Single Damper ...................................................................................................................83
Double Damper..................................................................................................................83
PURGE VALVE INSTALLATION .................................................................................................84
SERIAL CABLE INSTALLATION.................................................................................................84
TV 1001 SEM CONTROLLER INSTALLATION ..........................................................................84
Bottom mounting................................................................................................................84
Side mounting ....................................................................................................................85
Connection A - HIGH VACUUM FLANGE ........................................................................85
Connection B - FORE-VACUUM PUMP...........................................................................85
Connection configurations .................................................................................................86
Connection C - ELECTRICAL...........................................................................................86
PUMP USED WITH CORROSIVE GASES .................................................................................86
PUMP USED IN PRESENCE OF MAGNETIC FIELDS ..............................................................87
ACCESSORIES AND SPARE PARTS ........................................................................................87