Technical Specification - Agilent Technologies TV 1001 Navigator Serie Bedienungshandbuch

17 Technical Information

Technical Specification

Technical Specification

Tab. 3
Pumping speed (with inlet screen)
N :
2
He:
H :
2
Compression ratio
N :
2
He:
H :
2
Base pressure
with recommended forepump
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended forepump
Operating position
Operating ambient temperature
Bakeout temperature
Vibration level (displacement)
Lubricant
Cooling requirements
Coolant water
Noise level
248/312
ISO 160: CFF 10"/ ISO 200:
790 l/s 950 l/s
820 l/s 870 l/s
860 l/s 900 l/s
>1 x 10 1 x 10
9
5 x 10 1 x 10
7
2 x 10 1 x 10
6
< 1 x 10 mbar
-10
(< 1 x 10 Torr)
-10
(According to standard DIN 28 428, the base pressure is that
measured in a leak-free test dome, 48 hours after the completion of
test dome bake-out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump)
ISO 160, ISO 200, ISO 250 CF 10"
KF 40 NW
38000 rpm
< 4 minutes
DS 402, TriScroll 300
Any
+5 °C to +35 °C
120 °C at inlet flange max. (CF flange)
80 °C at inlet flange max. (ISO flange)
< 0.01 μm at inlet flange
permanent lubrication
Forced air or water
Minimum flow: 200 l/h (0.89 GPM)
Temperature: +10 °C to +20 °C
Pressure: 3 to 5 bar (45 to 75 psi)
<45 dB(A) at 1 meter
TV 1001 Navigator User Manual / 87-900-945-01 (I)
9
7
6
ISO 250:
1050 l/s
900 l/s
920 l/s