Agilent TPS-compact Betriebsanleitung Seite 11

Contents
Cleaning
Disposal
Service
8 Technical Information
Description of the TPS-compact
Turbopump Description
Controller Description
Control Panel Description
Scroll Pump Description
Technical specification
TPS-compact Outline
Inlet screen installation
High Vacuum Flange Connection Configurations
ASDF - Adaptive Scroll Driving Firmware
Gas Ballast
Interconnections
Input Power Connector
P3 - Vent
Gauge Connector
Pressure Display Module
J5 - In-Out
Signal Description
How to Connect the Open Collector Input of the Controller
How to Connect the Outputs of the Controller
J6 - Serial
Agilent TPS-compact User Manual
178
179
180
181
182
184
184
185
186
187
189
192
195
196
198
200
200
200
201
202
203
204
209
212
212
11