Agilent TPS-compact Betriebsanleitung Seite 10

Contents
7 Instructions for Use
About this manual
Validity
Definitions and terminology
Definition of Caution, Warning and Note
Warning Symbols
Safety
Proper use
Improper use
Protective equipment
Safety guideline for Turbomolecular Pumps
Transport & Storage
Product description
Installation
Preparation for installation
Set-up
TPS-compact Mounting
Connection of the High Vacuum Flange
Installation of ISO-K Flange
Installation of ConFlat Flange
Startup and Operation of the TPS-compact
Soft Start
Stopping the TPS-compact
Emergency stop
Maintenance
Rotor life
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