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Technical Specification - Agilent Technologies Special Turbo-V 1K-G Bedienungshandbuch

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Technical Specification

Tab. 2
Pumping speed (without inlet screen)
Ar:
N
:
2
He:
H
:
2
Compression ratio
Ar:
N
2:
He:
H
:
2
Base pressure with recommended
forepump
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended forepump
Operating position
Operating ambient temperature
Bakeout temperature
Vibration level (displacement)
Lubricant
Cooling requirements
Coolant water
Noise level
Special Turbo-V 1K-G User Manual / 87-901-006-01 (A)
750 l/s
810 l/s
950 l/s
680 l/s
>5 x 10
8
>1 x 10
8
1 x 10
5
2 x 10
4
< 1 x 10
mbar
-10
(According to standard DIN 28 428, the base pressure is that
measured in a leak-free test dome, 48 hours after the completion of
test dome bake-out, with a Turbopump fitted with a ConFlat flange
and using the recommended pre-vacuum pump)
ISO 160
KF 25
45000 rpm
< 5 minutes
>20 m
/h (TriScroll 600, DS 602, HS 452, HS 652)
3
Any
+5 °C to +35 °C
80° C at inlet flange max. (ISO flange)
< 0.01 μm at inlet flange
permanent lubrication
Water
Minimum flow: 200 l/h (0.89 GPM)
Temperature: +10 °C to +30 °C
Pressure: 3 to 5 bar (45 to 75 psi)
<45 dB(A) at 1 meter
Technical Information

Technical Specification

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Diese Anleitung auch für:

869-8961969-8978m002

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