Inhaltsverzeichnis
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SAFETY INFORMATION
This equipment is destined for use by profession-
als. The user should read this instruction manual
and any other additional information supplied by
Varian before operating the equipment. Varian will
not be held responsible for any events occurring
due to non-compliance, even partial, with these
instructions, improper use by untrained persons,
non-authorized interference with the equipment or
any action contrary to that provided for by specific
national standards.
This manual uses the following standard protocol:
WARNING!
The warning messages are for attracting the atten-
tion of the operator to a particular procedure or
practice which, if not followed correctly, could lead
to serious injury.
The caution messages are displayed before pro-
cedures which, if not followed, could cause dam-
age to the equipment.
NOTE
The notes contain important information taken
from the text.
GENERAL INFORMATION
These instructions contain basic information for
installing and operating miniature and 2 l/s VacIon
Pumps.
The available models are detailed in the following
table:
MODEL
Miniature
With 180° Copper Tube
With 90° Copper Tube
With 3/8" OD 180° Stainless Steel Tube
With 3/8" OD 90° Stainless Steel Tube
With 3/8" OD 180° Copper Tube, vacuum
proc.
With 3/8" OD 90° Copper Tube, vacuum
proc.
Alnico magnet
2 l/s
With 3/4" OD 180° Stainless Steel Tube
With 3/4" OD Kover-glass Tube
With 3/4" OD 180° Copper Tube, vacuum
proc.
With 3/4" OD 180° Stainless Steel Tube,
vacuum processed
With 3/4" OD 90° Stainless Steel Tube,
Tee style
CAUTION
P/N
913-0037
913-0040
913-0038
913-0041
913-0049
913-0050
913-0042
913-0032
913-0034
913-0035
913-0045
913-0046
MODEL
With 3/4" OD 180° Stainless Steel Short
Tube
With 3/4" OD OFHC Copper Tube
With 1 1/3" CFF 180° vacuum processed
Alnico magnet
The complete pumping system consists of the Va-
cIon pump, its magnet, and a power supply. These
VacIon pump is a pump which operates on the
principle of ion gettering in the pressure range
-3
from 10
Torr to less than 10
pump is needed to lower the system pressure from
atmosphere to below 10
The pump should be powered by a positive volt-
age of 3000-3500 Volt (open circuit), direct current
supply and the short circuit current of the control
unit should match the current drawn by the pump
at its maximum operating pressure.
INSTALLATION
During installation, keep the pump and system
clean. Avoid touching surfaces which will ulti-
mately be under vacuum. When the VacIon pump
is open to the atmosphere, take care to avoid in-
troducing foreign particles, oil, solder flux, or any
volatile substances. Before attaching the pump,
clean the system thoroughly. Chemical cleaning is
the most complete cleaning method for the vac-
uum system; however, do not attempt it when
pockets and crevices exist that will prevent thor-
ough rinsing. Degreasing with an acetone or
methanol followed by water-rinsing is usually suffi-
cient.
To achieve maximum pumping speed, connect the
pump to the system with a tube that has the short-
est length and the largest diameter possible.
For ultrahigh vacuum work, joints should be tung-
sten inert gas welded, hydrogen brazed, or vac-
uum brazed. Do not use flux in making joints for
ultrahigh vacuum.
Gaskets in the system should be of soft metal
such as annealed copper, aluminium, or gold.
After the pump is sealed in place, leak-check the
entire system.
Assemble the magnet to the pump magnet bracket
with the mounting screws that are provided.
10
INSTRUCTIONS FOR USE
P/N
913-0047
913-0052
913-5000
913-0011
-9
Torr. A roughing
-3
Torr.
87-400-085-01(D)
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