Bake-Out - thyracont VSM77D Betriebsanleitung

4.4
When a bake-out of the vacuum chamber is performed with the VSM being
mounted to the chamber, the temperature at the sensor flange must not exceed
160 °C.
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Status LED green
Normal Operation / Magnetron off
Status LED green
Normal Operation / Magnetron on
Set
Status LED orange
Initializing
Adjustment
Set
Status LED green
Normal Operation

Bake-Out

The transducer's voltage supply must be switched-off while the
chamber is heated. Otherwise a damage of the electronics can
be the result!
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3s
Status LED
orange
Adjustment
Set
Automatic
Adjustment of
zero or atmosphere
pressure Pirani
1s green
Status LED green
Normal Operation
39
Status LED
flashing quickly
flashing slowly
continuously on
10s orange
Status LED green
Normal Operation
Status LED red
Adjustment
3s
Error
Status LED green
Normal Operation
VSM-de-171005