Bake-Out - thyracont VSM77D Betriebsanleitung

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Readjustment via Software Command
See section 5.7.

4.4 Bake-Out

When a bake-out of the vacuum chamber is performed with the VSM being moun-
ted to the chamber, the temperature at the sensor flange must not exceed 160 C.
The transducer's voltage supply must be switched-off while the
chamber is heated. Otherwise a damage of the electronics can be
the result!
VSM-RS485-200116