Content
1
2
2.1
2.2
2.3
3
3.1
3.2
3.3
4
4.1
4.2
4.3
4.4
5
5.1
5.2
5.3
5.4
5.5
5.6
5.7
5.8
5.9
6
7
Manufacturer:
Thyracont Vacuum Instruments GmbH
Max Emanuel Straße 10
D 94036 Passau
Tel.: ++49/851/95986-0
email: info@thyracont-vacuum.com
Internet: http://www.thyracont-vacuum.com
Downloaded from
www.Manualslib.com
For Orientation ......................................................................... 31
Delivery Content ....................................................................... 31
Installation .................................................................................... 33
Vacuum Connection ................................................................. 33
3.3.1
3.3.2
Operation ...................................................................................... 36
General ..................................................................................... 36
Operating The VSM ................................................................. 37
Readjustment ........................................................................... 38
Bake-Out .................................................................................. 39
Communication ............................................................................ 40
Measurement Query ................................................................ 43
Display Functions ..................................................................... 43
Switch-Points ............................................................................ 44
Readjustment ........................................................................... 46
Sensor Parameters .................................................................. 46
Software ............................................................ 49
Technical Data .............................................................................. 52
manuals search engine
29
VSM-de-171005