Status Led; Bake-Out - thyracont VSM77E Betriebsanleitung

4.2 Status LED

The status LED of the VSM signalizes the following operational states:

4.3 Bake-Out

When a bake-out of the vacuum chamber is performed with the VSM being moun-
ted to the chamber, the temperature at the sensor flange must not exceed 160 C.
The transducer's voltage supply must be switched-off while the
chamber is heated. Otherwise a damage of the electronics can be
the result!
VSM-EtherCAT-200116
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