Agilent Technologies 947 Betriebs- Und Servicehandbuch Seite 71

Models 947, 948 and 960 Leak Detectors Operations and Service Manual
In Figure 2-5, numbers in white circles designate the location of valves. Other key parts of
the vacuum system, represented by numbers in black circles, are identified after Figure 2-5.
3 2
1 Reservoir
2
Turbo/Diffusion Pump
3 Forepump
4 Rough Pump
Manifold
5
6 Test Port
10
1 1
12
8
9
4
Figure 2-5 960 Flow Diagram
7 Thermocouple Gauge (TC1)
8
Thermocouple (TC2)
9 System Pressure Gauge
10 Standard Leak
Nitrogen Cold Trap
1 1
Spectrometer Tube
12
1
5
6
7
Rough Valve
Test Valve
Vent Valve
Gross Leak Valve
2-7