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Agilent Technologies 947 Betriebs- Und Servicehandbuch Seite 10

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Models 947, 948 and 960 Leak Detectors Operations and Service Manual
4-9
947/948/960 Spectrometer Tube Installation .................................................................... 4-24
4-10
TC1 Gauge in the MVBA .................................................................................................. 4-26
4-11
TC2 Gauge in the SBA ..................................................................................................... 4-28
4-12
Rough Pump and Forepump Oil Level Check .................................................................. 4-34
4-13
The Test Port .................................................................................................................... 4-35
4-14
Remove the Test Port Compression Ring and O-ring ...................................................... 4-36
4-15
Placing the O-ring and Compression Ring onto the Test Port .......................................... 4-37
A-1
Service Pendant Keypad ....................................................................................................A-1
B-1
Removing the Service Pendant Shelf .................................................................................B-2
B-2
The Top Panel at the Rear of the Turret .............................................................................B-3
B-3
The Test Port ......................................................................................................................B-3
B-4
The Top Panel from the Front of the 947/948/960..............................................................B-4
B-5
Ion Source Replacement ....................................................................................................B-6
B-6
Location of the Turbo Pump ...............................................................................................B-9
B-7
Turbo Power and Foreline to Turbo Connections .............................................................B-10
B-8
The Turbo Power Connection ...........................................................................................B-11
B-9
Radiator Clamp holding Fan to Turbo...............................................................................B-11
B-10
Location of Forepump and Rough Pump — Wet and Dry Configurations ........................B-15
B-11
Rough Pump Manifold and Exhaust Connections ............................................................B-16
B-12
Rough Pump Manifold and Exhaust Connections ............................................................B-18
G-1
Test Piece Evacuated: Tracer Probe Used to Locate Leak ............................................... G-6
G-2
Test Piece Evacuated and Hooded with Helium Atmosphere to
Determine Overall Leak Rate ............................................................................................ G-6
G-3
Test Piece Pressurized: Detector Probe Used to Locate Leak.......................................... G-6
G-4
Test Piece Sealed with Helium and/or Other Gases –
Bell Jar Used to DetermIne Overall Leak Rate .................................................................. G-7
G-5
Magnetic Separation Principle ........................................................................................... G-8
x

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948960

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