Agilent Technologies 947 Betriebs- Und Servicehandbuch Seite 7

Models 947, 948 and 960 Leak Detectors Operations and Service Manual
Section 5. Troubleshooting .......................................................................................................... 5-1
5.1 Error Condition Codes ........................................................................................................ 5-2
5.2 Troubleshooting Symptoms and Solutions .......................................................................... 5-3
5.3 Fehlerzustandscodes........................................................................................................... 5-5
5.4 Symptome und Lösungen bei der Fehlersuche ................................................................... 5-6
Appendix A. Service Pendant Keypad Functions ..................................................................... A-1
A.1 Keypad Functions................................................................................................................A-1
A.1.1 Using the Service Pendant ........................................................................................A-2
A.2 Glossary of Function Keys...................................................................................................A-3
A.3 Glossary of Input and Data Keys .........................................................................................A-3
Appendix B. Parts Replacement ................................................................................................. B-1
B.1 Removing the Covers ..........................................................................................................B-1
B.1.1 Opening the Turret .....................................................................................................B-2
B.1.1.1 Removing the Service Pendant Shelf .............................................................B-2
B.1.2 Removing the Top Panel ...........................................................................................B-3
B.1.3 Replacing all Panels and Covers ...............................................................................B-4
B.1.3.1 Replacing the Service Pendant Shelf .............................................................B-4
B.1.3.2 Replacing the Top Panel.................................................................................B-5
B.2 Replacing the Ion Source ....................................................................................................B-6
B.3 Replacing the Turbo Pump ..................................................................................................B-9
B.3.1 Turbo Pump ...............................................................................................................B-9
B.3.1.1 Removing the Turbo Pump ...........................................................................B-10
B.3.1.2 Replacing the Turbo Pump ...........................................................................B-12
B.3.1.2.1 Examining and Cleaning Centering Rings, O-rings and Manifold .B-12
B.3.1.2.2 Connecting the Turbo Pump to the SVBA ....................................B-13
B.4 Replacing the Rough Pump...............................................................................................B-15
B.4.1 Wet Systems ............................................................................................................B-15
B.4.1.1 Removing the Wet System Rough Pump .....................................................B-16
B.4.1.1.1 Replacing the Wet System Rough Pump.......................................B-17
B.4.1.1.2 Examining and Cleaning Centering Rings, O-rings and Manifold .B-17
B.4.1.1.3 Re-installing the Wet System Rough Pump ..................................B-18
B.4.2 Dry Systems ............................................................................................................B-20
B.4.2.1 Removing the Dry System Rough Pump ......................................................B-20
B.4.2.2 Replacing the Dry System Rough Pump ......................................................B-21
B.4.2.2.1 Examining and Cleaning Centering Rings, O-rings and Manifold ..B-21
B.4.2.2.2 Re-installing the Dry System Rough Pump ...................................B-21
B.5 Replacing the Forepump ...................................................................................................B-22
B.5.1 Wet ..........................................................................................................................B-22
B.5.1.1 Removing the Wet System Forepump ..........................................................B-23
B.5.1.2 Replacing the Wet System Forepump ..........................................................B-24
B.5.1.2.1 Examining and Cleaning Centering Rings, O-rings and Manifold ..B-24
B.5.1.2.2 Re-installing the Wet System Forepump ......................................B-24
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