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948
Agilent Technologies 948 Handbücher
Anleitungen und Benutzerhandbücher für Agilent Technologies 948. Wir haben
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Agilent Technologies 948 Anleitung zum kostenlosen PDF-Download zur Verfügung: Betriebs- Und Servicehandbuch
Agilent Technologies 948 Betriebs- Und Servicehandbuch (242 Seiten)
Marke:
Agilent Technologies
| Kategorie:
Prüfgeräte
| Dateigröße: 5 MB
Inhaltsverzeichnis
Inhaltsverzeichnis
3
Declaration of Conformity
13
Warranty
14
Warranty Replacement and Adjustment
14
Garantie
15
Ersatz und Einstellung unter Garantie
15
Factory Calibration Data
17
List of Options or Accessories Included with System
17
Hazard and Safety Information
18
Solvents
19
Equipment, General
20
Power and Static
21
Figure Description
21
Leak Detector
21
Vacuum Equipment and Cleanliness
22
O-Ring Care
23
Spectrometer Tube
24
Pumps
24
Varian Services
25
Contacting Varian Vacuum Technologies
25
Informationen über Gefahren und Sicherheit
26
Lösungsmittel
27
Maschinen, Allgemein
28
Strom und Statik
29
Vakuumgeräte und Sauberkeit
31
Pflege von O-Ringen
32
Pumpen
33
Spektrometerrohr
33
Dienstleistungen von Varian
34
Kontaktieren von Varian Vacuum Technologies
34
Section 1. Introduction to Models 947, 948 and 960 Leak Detectors
35
Platform Electronics
38
Unpacking Instructions
38
Service pendant
38
Removing the 947/948/960 from the Skid
39
Removing Loose Packing from Interior of 947/948/960
40
Front Panel Controls and Indicators
40
Inner Door Instruction Label
43
Rear Panel Power Connection and Circuit Breakers
44
Rear Panel
44
Service pendant
45
Installation Preparation
46
Power
46
Installation Services
47
Liquid Nitrogen (Models 948/960 Only)
47
Oil-Sealed Vacuum Pumps
47
Special Installation Requirements
47
Storage
48
Optional Rear Panel Interface Connections
48
Plattformelektronik
52
Anleitungen zum Auspacken
53
Entfernen der 947/948/960 von der Palette
53
Anzeigen und Steuerelemente der Fronttafel
55
Einführung in die Lecksucher, Modell 947, 948 und 960
52
Anzeigen und Steuerelemente der Fronttafels
55
Anweisungsschild an der Innentür
58
Anweisungsschild auf Aufsatztür
58
Rückseitige Schalttafelstromanschluss und Trennschalter
59
Rückseitige Schalttafel
59
Hängebedienungstafel
60
Vorbereitung zur Installation
61
Strom
61
Flüssigstickstoff (nur Modell 948/960)
62
Spezielle Anforderungen bei der Installation
62
Öldichte Vakuumpumpen
62
Installationsdienste
63
Aufbewahrung
63
Optionale Anschlüsse an der Rückseitigen Schalttafel
64
Schnittstellenanschlüsse an der Rückseitigen Schalttafel
64
Section 2. Leak Detector Integration
65
Physical Considerations
65
Common Configuration
65
Electronic Considerations for the Optional Rear Panel Interface
73
Discrete I/O J120 Inputs
73
BCD J121 Outputs
74
Host Serial Port J123 Pinouts
75
Optional Interface Connections
76
Grounding and Isolation
76
Setup
77
Discrete I/O
77
Operation Using the Optional Rear Panel Interface
79
Parallel Enable
79
Section 3. Operation
81
Front Panel LED Indicators and Controls
81
Initial System Parameter Setup
83
Parameters and Operating Modes
83
Start-Up
89
Startup Procedure
90
Calibration and Sensitivity Checks
91
Operating Procedures
94
Auto Ranging
94
Manual Ranging
95
Standby
96
Shutdown
97
Using the pendant for Parameter Setup
97
Optional Discrete I/O
98
Betrieb
99
LED-Anzeigen und Steuerelemente auf der Fronttafel
100
Erste Einstellung der Systemparameter
102
Parameter und Betriebsmod
102
Inbetriebnahme
108
Steuerelemente zur Inbetriebnahme
108
Anleitungen zur Inbetriebnahme
110
Kalibrierungs- und Empfindlichkeitsprüfungen
111
Exponentenanzeige mit Angegebenem Zustandscode
111
Betriebsverfahren
114
Automatische Bereichseinstellung
114
Position des Schalters AUTO/MAN MODE
115
Manuelle Bereichseinstellung
116
Bereitschaft
117
Abschalten
117
Parametereinstellung mit der Hängebedienungstafel
118
Tastenfeld der Hängebedienungstafel
118
Optionale Diskrete E/A
119
Section 4. Maintenance
121
Daily Maintenance
125
Calibration Check
125
Leak Checking
125
General Suggestions for Leak Checking
126
Yearly Maintenance
127
Replacing the Calibrated Leak
127
Re-Calibrate the Internal Calibrated Leak
127
Removing the Internal Calibrated Leak
127
Replacing the Internal Calibrated Leak
129
Liquid Nitrogen Cold Trap (Models 948/960 Only)
130
Flüssigstickstoff-Kühlfalle (nur Modele 948/960)
131
Spectrometer Tube Overhaul
132
Removal of the Spectrometer Tube and Preamplifier
133
Disassembly of the Spectrometer Tube and Preamplifier
135
Reassembly of the Spectrometer Tube and Preamplifier
137
Spectrometer Tube Cleaning
137
Reinstallation of the Spectrometer Tube
141
Air Filter
142
Spectrometer Tube Exchange
143
Reinstalling the Spectrometer Tube
143
Removing and Replacing both the Spectrometer Tube Assembly and Preamplifier
143
TC1 and TC2 Gauge Replacement and Calibration
146
Replacement of the TC1 Gauge in the Main Valve Block Assembly
146
Replacement of the TC2 Gauge in the Service Block Assembly
148
System Pressure Gauge (TC2) Calibration
150
Thermocouple Gauge Calibration Procedures
150
Vacuum (Low Pressure) Calibration
150
Service pendant Keypad
150
Atmospheric Calibration
151
Test Port Pressure Gauge (TC1) Calibration
152
Vacuum (Low Pressure) Calibration
152
Atmospheric Calibration
153
Rough Pump and Forepump Oil Level Check (Oil-Sealed Mechanical Pumps)
154
Cleaning the Test Port
155
Condition of Oil (Oil-Sealed Mechanical Pumps)
155
Removing the Test Port
155
Examining and Cleaning the Test Port
156
Replacing the Test Port
157
Spare Parts
157
Exchange Assemblies
157
Replacement Parts
158
Ersatz Teile
159
Section 5. Troubleshooting
161
Error Condition Codes
162
Troubleshooting Symptoms and Solutions
163
Fehlerzustandscodes
165
Symptome und Lösungen bei der Fehlersuche
166
Appendix A. Service pendant Keypad Functions
169
Using the Service pendant
170
Glossary of Function Keys
171
Glossary of Input and Data Keys
171
Appendix B. Parts Replacement
177
Removing the Covers
177
Opening the Turret
178
Removing the Service pendant Shelf
178
Removing the Top Panel
179
Replacing All Panels and Covers
180
Replacing the Service pendant Shelf
180
Replacing the Top Panel
181
Replacing the Ion Source
182
Replacing the Turbo Pump
185
Turbo Pump
185
Removing the Turbo Pump
186
Examining and Cleaning Centering Rings, O-Rings and Manifold .B
188
Replacing the Turbo Pump
188
Connecting the Turbo Pump to the SVBA
189
Replacing the Rough Pump
191
Wet Systems
191
Removing the Wet System Rough Pump
192
Examining and Cleaning Centering Rings, O-Rings and Manifold .B
193
Replacing the Wet System Rough Pump
193
Re-Installing the Wet System Rough Pump
194
Dry Systems
196
Removing the Dry System Rough Pump
196
Examining and Cleaning Centering Rings, O-Rings and Manifold
197
Re-Installing the Dry System Rough Pump
197
Replacing the Dry System Rough Pump
197
Replacing the Forepump
198
Wet
198
Removing the Wet System Forepump
199
Examining and Cleaning Centering Rings, O-Rings and Manifold
200
Re-Installing the Wet System Forepump
200
Replacing the Wet System Forepump
200
Dry System
202
Removing the Dry System Forepump
202
Removing the Isolation Valve from the Forepump
202
Examining and Cleaning Centering Rings, O-Rings and Manifold
203
Removing the Exhaust Fitting
203
Removing the Nitrogen Purge Connection from Pump
203
Removing the Pump from the Cabinet
203
Replacing the Dry System Forepump
203
Connecting the Nitrogen Purge Pump
204
Re-Installing the Dry System Forepump
204
Replacing the Isolation Valve
204
Completing Mounting the Pump to the Cabinet Floor
205
Replacing the Exhaust Fitting
205
Appendix C. Communications Protocol
207
Protocol (RS-232)
207
Appendix D. Inputs and Outputs
215
Service Serial Interface (J1)
215
Optional Rear Panel Interface
215
Discrete I/O Parallel Interface (J120)
215
BCD Discrete Output Parallel Interface (J121)
217
Interface (J122) for Optional Universal Remote Control
218
Host Serial Port (J123)
218
Technische Daten für 947/948
227
Appendix E. 947/948 Specifications
227
Appendix E. 947/948 Specifications
227
Appendix F. Accessories
227
Appendix G. Leak Detection Theory
229
Leak Testing-Why Is It Needed
229
Classes of Leak Detection
229
Terminology
230
Various Methods of Testing for Leaks
231
Helium Mass Spectrometer Leak Detection (MSLD)
232
Principles of Mass Spectrometry
232
Application as a Leak Detector
232
The Nature of Flow in a Vacuum
232
Facts about Leak Rates
232
Leak Detection Methods
233
Test Piece Evacuated
234
Test Piece Pressurized
234
Test Piece Already Sealed
235
Mass Spectrometer Leak Detector-Simplified Description
236
Index
237
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