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Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases, or
in explosive environments or those with a high fire risk. During
operation, the following environmental conditions must be
respected:
−
maximum pressure: 2 bar above atmospheric pressure
−
temperature: from +5 °C to +35 °C
−
relative humidity: 0 - 95% (non-condensing)
In the presence of magnetic fields the pump must be protected
using a ferromagnetic shield. See the appendix "Technical
Information" for detailed information.
NO!
!
WARNING!
To avoid injury, never put fingers or any objects whatsoever
in the inlet port of the turbopump. The use of the protective
screen is strongly advised (optional extra). If a vibration
damper or flexible metallic bellows are used on the inlet port,
make sure that the pump is fixed to the base.
The Turbo - V 6000 series pumps must only be used with one of
the special Varian controllers (series 969-9491, 969-9591) and
must be connected to a primary pump (see "Technical
Information").
The turbopump must be installed vertically with a maximum slope
of 10°.
The pump can either rest on its support pedestal or it can be
suspended from the high vacuum flange.
Fix the turbopump in a stable position connecting the inlet flange
of the turbopump to a fixed counter-flange capable of withstanding
a torque of 20000 Nm around its axis.
The turbopump with ISO inlet flange must be fixed to the vacuum
chamber by means of clamps or claws. The following table shows
the necessary number of clamps or claws and the relevant fixing
torque.
FLANGE
FIXING
DEVICE
ISO 500
M16 clamps
M16 claws
When the pump rest on its legs, attach them to the bench using
the M12 threaded holes in the legs where the rubber feet are
installed. These holes are located on a 550 mm (21.6 inches)
diameter.
For
installation
of
optional
Information".
N.
FIXING TORQUE
12
80 Nm
12
80 Nm
accessories,
see
"Technical
USE
All the instructions for the correct use of the turbopump are
contained in the control unit manual.
Read the manual carefully before using the pump.
!
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 2 bar
(above atmospheric pressure).
!
To avoid damage to the pump the lubrication oil level must never
decrease below the MIN level during the pump operation.
!
Avoid impacts or harsh movements of the pump when in
operation. The bearings may become damaged.
!
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for each
gas disposal.
Do not use the pump in presence of explosive gases.
MAINTENANCE
The Turbo-V 6000 series pump does not require any
maintenance. Any work performed on the pump must be carried
out by authorised personnel.
The lubrication oil must be changed every six months or whenever
the oil becomes opaque or dark brown. The relevant procedure is
detailed into the appendix "Technical Information".
!
Before carrying out any work on the turbopump, disconnect it from
the supply, vent the pump by opening the appropriate valve, wait
until the rotor has stopped turning and wait until the surface
temperature of the pump falls below 50 °C.
In the case of breakdown, contact your local Varian service center
who can supply a reconditioned pump to replace that broken
down.
Before returning the pump to the constructor for repairs, or
replacement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be
inserted in the pump package before shipping.
If a pump is to be scrapped, it must be disposed of in accordance
with the specific national standards.
24
INSTRUCTIONS FOR USE
CAUTION
CAUTION
CAUTION
WARNING!
WARNING!
NOTE
87-900-838-01(B)
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