Inhaltsverzeichnis
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Turbo-V 2000HT
969-9084 series
969-9085 series
87-900-914-01(F)
MARCH 2003
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Inhaltsverzeichnis
Verwandte Anleitungen für Varian Turbo-V 2000HT
Inhaltszusammenfassung für Varian Turbo-V 2000HT
- Seite 1 MANUALE DI ISTRUZIONI Turbo-V 2000HT BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES 969-9084 series BEDRIJFSHANDLEIDING 969-9085 series INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-914-01(F) MARCH 2003...
- Seite 2 Turbo-V 2000HT...
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Seite 5: Inhaltsverzeichnis
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO ....................9 GEBRUIKSAANWIJZINGEN ..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Seite 6: Informazioni Generali
Varian prima dell'utilizzo dell'ap- i componenti destinati ad essere esposti al vuoto. Utilizzare sempre i parecchiatura. La Varian si ritiene sollevata da eventuali responsabilità guanti o altra protezione adeguata. dovute all'inosservanza totale o parziale delle istruzioni, ad uso impro- prio da parte di personale non addestrato, ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche. - Seite 7 Le pompe turbomolecolari della serie Turbo-V2000HT devono infiammabili o radioattivi, seguire le appropriate procedure tipiche essere utilizzate solo con uno degli appositi controllori Varian (se- di ciascun gas. Non usare la pompa in presenza di gas esplosivi. rie 969-9462, 969-9562) e devono essere collegate ad una pompa primaria (vedere schema in "Technical Information").
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Seite 8: Allgemeines
Anschluß der Turbopumpe an die Anlage Falls die Lagerdauer aus verschiedentlichen Gründen die genannte Frist überschreiten sollte, ist die Pumpe an das Werk zurückzusenden. Für Informationen wenden Sie sich bitte an den örtlichen Varian Vertre- ter. VOR DER INSTALLATION Die Pumpe wird mit einer speziellen Schutzverpackung geliefert. Even- tuelle Transportschäden müssen der zuständigen örtlichen Verkaufs-... -
Seite 9: Anwendung
Rotor vollkommen stillsteht und die Temperatur am ligen Flanschgrößen und Klemmenarten angegeben. Pumpenghehäuse unter 50°C abgesunken ist. FLANSCH KLEMM- ANZUGS- Bei einem Defekt kann der Varian Service oder der "Varian ad- SCHELLE MOMENT vanced exchange service" in Anspruch genommen werden. ISO 250 Doppelklemme mit... -
Seite 10: Indications Generales
éléments devant être exposés au vide. d'instructions ainsi que toute autre indication supplémentaire four- Mettre toujours des gants ou toute autre protection appro- nie par Varian, avant d'utiliser l'appareil. Varian décline par consé- priée. quent toute responsabilité en cas d'inobservation totale ou partielle des instructions données, d'utilisation incorrecte de la part d'un... - Seite 11 "advanced exchange service", remplir et faire parve- Collier simple à filetage M10 22Nm nir au bureau local Varian la fiche "Sécurité et Santé" annexée à la présente notice d'instructions. Une copie de cette fiche devra La turbopompe avec bride d’admission ISO F 250 (bolted) doit être mise dans l'emballage de la pompe avant l'expédition.
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Seite 12: Información General
Varian antes de componentes destinados a someterse al vacío. Utilizar siempre los utilizar el equipo. Varian se considera libre de cualquier responsabilidad guantes u otra protección apropiada. debida al incumplimiento total o parcial de las instrucciones, al uso... - Seite 13 (véase el apéndice “Technical deberán utilizar sólo con uno de los controladores apropiados Information”). Varian (serie 969-9462, 969-9562) y se deberán acoplar a una bomba primaria (véase esquema en "Technical Information". La turbobomba se puede instalar en cualquier posición. ¡PELIGRO! Cuando la bomba se utiliza para bombear gases tóxicos,...
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Seite 14: Preparação Para A Instalação
Para evitar problemas de perdas de gás, não tocar com as mãos os informação adicional fornecida pela Varian antes de usar a componentes destinados à exposição do vácuo. Utilizar sempre luvas aparelhagem. - Seite 15 TIPO DE BORNE N° TORQUE Em caso de defeito é possível usufruir do serviço de reparação Varian ou do "Varian advanced exchange service", que permite APERTO obter uma bomba regenerada que substitua a bomba com defeito. ISO 250 Borne duplo com rosca M10...
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Seite 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens met de blote handen aangeraakt worden. Gebruik altijd het apparaat in gebruik te nemen. Varian acht zich niet handschoenen of een andere geschikte bescherming. aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht... - Seite 17 De turbomoleculaire pompen van de serie V2000HT mogen alleen geleverd (zie bijlage “Technical Information"). gebruikt worden in combinatie met een van de speciale Varian controllers (serie 969-9462, 969-9562) en moeten aangesloten zijn op een primaire pomp (zie schema in "Technical information").
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Seite 18: Brugsanvisning
For at undgå afgasningsproblemer skal man ikke røre med de Varian har leveret, inden udstyret tages i brug. Varian er ikke bare hænder de dele, der vil bliver udsat for vakuum. Brug altid ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er... - Seite 19 Hvis der findes magnetfelter må pumpen afskærmes. Se bilag Information”). “Technical Information” for yderligere detaljer. Turbomolekulærpumperne i Turbo-V2000HT serien må kun anvendes med en af de særlige Varian kontrolapparater (serie ADVARSEL! 969-9462, 969-9562) og skal forbindes med en primær pumpe (se skemaet i "Technical Information").
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Seite 20: Bruksanvisning
Utrustningen är avsedd för yrkesmässig användning. Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som... - Seite 21 Turbomolekylärpumparna i serien V2000HT måste användas med Då pumpen används för pumpning av giftiga, lättantändliga eller en särskild styrenhet från Varian (serie 969-9462, 969-9562), och radioaktiva typ, bör man följa de särskilda anvisningarna för varje anslutas till en förpump (se schemat " Technical information ").
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Seite 22: Brukerveiledning
Brukeren bør lese denne brukerveiledningen og all annen Likevel anbefaler vi å holde den lukket til den er montert i informasjon fra Varian før utstyret tas i bruk. Varian kan ikke systemet, slik at den ikke forurenses eller utsettes for holdes ansvarlig for hendelser som skjer på... - Seite 23 (argon eller kvelstoff) koples for å beskytte lagrene (se “Teknisk Se “Teknisk informasjon” for detaljer. informasjon”). Turbo-V2000HT serien turbo-molekulære pumper må kun brukes med en av de spesielle Varian kontrollere (serie 969-9462, 969- 9562), og må koples til hovedpumpen (se skjema i "Teknisk ADVARSEL! informasjon ").
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Seite 24: Yleisiä Tietoja
Jotta kaasun poistumisongelmilta vältyttäisiin, tyhjiöön käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei tarkoitettuihin osiin tule koskea paljain käsin. Hanskojen tai muun ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden sopivan suojan käyttö on tarpeellinen. täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön... - Seite 25 (typpi tai argooni) jotta laakerit suojataan (katso Information“-liitteestä. liite “Technical information”). Sarjan V2000HT turbomolekyylipumppuja tulee käyttää ainoastaan niihin sopivien varian valvojien kanssa (sarja 969-9462, 969-9562) ja niiden täytyy olla yhdistettyinä pääpumppuun (katso kaaviota VAARA! osasta "Technical Information"). Jolloin pumppua käytetään myrkyllisten, tulenvaarallisten ja Turbopumppu voidaan asentaa mihin tahansa asentoon.
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Seite 26: Pdhgies Crhsews
£llh prÒ sqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. H Varian den f◊rei kam∂a euqÚ nh Ò son afor£ thn olikÿ ÿ merikÿ aq◊thsh twn odhgièn, thn akat£llhlh crÿsh ek m◊rouj anekpa∂deutou proswpikoÚ , auqa∂retej epemb£seij ÿ crÿsh pou den sumfwne∂... - Seite 27 50° C. dagk£nwn kai me poio zeÚ goj bidèmatoj pr◊pei na sfictoÚ n. Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto s◊rbij episkeuèn Varian ÿ sto “Varian advanced exchange service”, pou FLANTZA EIDOS DAGKANHS ZEUGOS BIDWMATOS saj d∂nei th dunatÒ thta na antikatastÿsete thn calasm◊nh antl∂a me m∂a £llh eniscum◊nh.
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Seite 28: General Information
If for any reason the shelf life time is exceeded, the pump has to be returned to the factory. Please contact the local Varian Vacuum Sales and Service representative for informations. PREPARATION FOR INSTALLATION The pump is supplied in a special protective packing. - Seite 29 Do not use the pump in presence of explosive gases. mation" for detailed information.The Turbo - V 2000HT series pumps must only be used with one of the special Varian control- MAINTENANCE lers (series 969-9462, 969-9562) and must be connected to a primary pump (see "Technical Information").
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Seite 30: Technical Information
TECHNICAL INFORMATION The Turbo-V2000HT pump consists of a high fre- DESCRIPTION OF THE TURBOPUMP quency motor driving a turbine fitted with 8 bladed The Turbo-V2000HT pump is available in two ver- stages and 4 Macrotorr stages. The turbine rotates sions which differ only in their inlet flange. in an anticlockwise direction when viewed from the They are: high vacuum flange end. -
Seite 31: Technical Specification
TECHNICAL INFORMATION TECHNICAL SPECIFICATION The following figure shows the Turbo-V2000HT pump outline drawing. Dimensions are in inches [mm]. Pumping speed : 1950 l/s Coolant water minimum flow: 200 l/h (0.89 GPM) He: 2000 l/s temperature: + 10° C to + 20° C : 1500 l/s pressure: 3 to 5 bar (45 to 75 Psi) Compression ratio... - Seite 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-914-01(F)
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Seite 33: Inlet Screen Installation
TECHNICAL INFORMATION INLET SCREEN INSTALLATION WATER COOLING KIT INSTALLATION Two types of water cooling kits are available to be The inlet screens prevents the blades of the pump mounted when the pump is used under heavy load from being damaged by debris greater than 3 mm conditions or when air cooling is insufficient. - Seite 34 TECHNICAL INFORMATION The assembled kit must be screwed into the suit- Two 6 mm (1/4") internal diameter rubber or plas- able holes of the pump body with a recommended tic hoses from the water supply must be fitted to closing torque of 5 Nm. the two nozzles.
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Seite 35: Vent Device Installation
TECHNICAL INFORMATION VENT DEVICE INSTALLATION VENT VALVE INSTALLATION The vent valve mod. 969-9843 allows to avoid un- desired venting of the pump during a temporary power failure (5 sec maximum), and enables an The vent device mod. 969-9831 allows to avoid automatic vent operation. -
Seite 36: Gas Purge Valve Installation
CAUTION To prevent bearing damage, Varian suggests the following purge gas flow rates: 10 sccm (0.17 mbar l/s) for a mild purge process, or 20 sccm (0.34 mbar l/s) for an heavy process. -
Seite 37: Typical Layout Diagram
TECHNICAL INFORMATION The recommended procedure to vent the system TYPICAL LAYOUT DIAGRAM and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points: Close the corrosive gas flow into the system. Leaving the Turbo-V pump and the backing pump running and the purge gas flowing, wait for enough time to evacuate the corrosive... -
Seite 38: Connection B - Fore-Vacuum Pump
Connection C - ELECTRICAL as shown in the figure. For ConFlat flange connections we recommend using Varian hardware. Other hardware can be used if it satisfies to this specifications: − stainless steel screws − minimum strength point of 500 N/mm −... -
Seite 39: Moving The Gas Purge Valve And Forevacuum Pump Connections
Dual stage rotary vane pump DS 949-9335 602 with single phase motor Dual stage rotary vane pump DS 949-9336 602 with 3 phase motor For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. 87-900-914-01(F) -
Seite 40: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Seite 41 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Seite 42 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...