Inhaltsverzeichnis
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Turbo-V 1000HT
Model 969-9074
Model 969-9075
87-900-892-01(D)
APRIL 2002
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
Werbung
Inhaltsverzeichnis
Verwandte Anleitungen für Varian Turbo-V 1000HT
Inhaltszusammenfassung für Varian Turbo-V 1000HT
- Seite 1 MANUALE DI ISTRUZIONI Turbo-V 1000HT BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING Model 969-9074 INSTRUKSTIONSBOG Model 969-9075 BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-892-01(D) APRIL 2002...
- Seite 2 Turbo-V 1000HT...
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Seite 5: Inhaltsverzeichnis
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO....................9 GEBRUIKSAANWIJZINGEN..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Seite 6: Informazioni Generali
Varian prima dell'utilizzo dell'apparecchiatura. La Varian si ri- tiene sollevata da eventuali responsabilità dovute all'inosser- vanza totale o parziale delle istruzioni, ad uso improprio da parte di personale non addestrato, ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche. - Seite 7 M10 In caso di guasto è possibile usufruire del servizio di riparazio- ne Varian o del "Varian advanced exchange service", che per- La turbopompa con flangia di ingresso ConFlat deve essere mette di ottenere una pompa rigenerata in sostituzione di fissata alla camera da vuoto per mezzo dell'apposita minuteria quella guasta.
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Seite 8: Allgemeines
Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen Mißachtung einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V1000HT handelt es sich um Turbomolekularpumpen für Hoch- Ultrahochvakuumanwendungen. Sie eignen sich für jede Art von Gas oder gashaltige Gemische, nicht jedoch zur Förderung... -
Seite 9: Anwendung
Pumpenghehäuse unter 50°C abgesunken ist. speziellen Varian-Befestigungsmaterial an die Vakuumkammer angeschlossen werden. Weitere Hinweise siehe Anhang Bei einem Defekt kann der Varian Service oder der " advanced “Technical Information”. exchange service" in Anspruch genommen werden. Wenn die Pumpen über ihr Unterteil installiert werden sollen, müssen in die Bohrungen des Unterteils 3 M6-Schrauben... -
Seite 10: Indications Generales
Varian, avant d'utiliser l'appareil. Varian décline par conséquent toute responsabilité en cas d'inobservation totale ou partielle des instructions données, d'utilisation incorrecte de la part d'un personnel non formé, d'opérations non autorisées ou d'un emploi contraire... - Seite 11 4,5 Nm. réparations ou un "advanced exchange service", remplir et Pour l’installation des accessoires en option, consulter faire parvenir au bureau local Varian la fiche "Sécurité et “Technical Information”. Santé" annexée à la présente notice d'instructions. Une copie de cette fiche devra être mise dans l'emballage de la pompe...
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Seite 12: Instrucciones De Uso
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... - Seite 13 “Technical Information” para más detalles. “Technical Information”). Las bombas turbomoleculares de la serie Turbo-V1000HT han de utilizarse exclusivamente con uno de los controladores Varian (serie 969-9454, 969-9554) y se conectarán a una ! ! ! ! ¡PELIGRO! bomba primaria (véase esquema en “Technical Information”).
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Seite 14: Instruções Para O Uso
Varian antes de usar a aparelhagem. A Varian não se responsabiliza pela eventual inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não autorizadas ou pelo uso contrário às normas... - Seite 15 Em caso de defeito é possível usufruir do serviço de reparação "Technical Information". Varian ou do "Varian advanced exchange service", que permite Para fixar a bomba através da sua base, é necessário utilizar obter uma bomba regenerada que substitua a bomba com três parafusos M6 fixados aos furos específicos existentes na...
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Seite 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Seite 17 In geval van storing is het mogelijk om de reparatiedienst van vacuümkamer worden bevestigd met behulp van de speciale Varian of de "Varian advanced exchange service" in te mechanische bevestigingselementen van Varian. Zie voor schakelen: zo krijgt men een ruilpomp ter vervanging van de meer informatie de bijlage “Technical Information”.
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Seite 18: Brugsanvisning
Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb på... - Seite 19 Når pumpen anvendes til pumpning af giftige, brandfarlige eller Turbomolekulærpumperne i V1000HT serien må kun anvendes radioaktive gasser, skal de gældende forskrifter for den enkelte med en af de særlige Varian kontrolapparater (serie 969-9454, gastype strengt overholdes. 969-9554) og skal forbindes med en primær pumpe (se Pumpen må...
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Seite 20: Bruksanvisning
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Seite 21 ! ! ! ! Turbomolekylärpumparna i serien V1000HT måste användas VARNING! med en särskild styrenhet från Varian (serie 969-9454, 969- Då pumpen används för pumpning av giftiga, lättantändliga 9554), och anslutas till en förpump (se schema i " Technical eller radioaktiva typ, bör man följa de särskilda anvisningarna information").
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Seite 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Seite 23 Turbo-V1000HT serien turbo-molekulære pumper må kun Når pumpen brukes for å pumpe giftige, brannfarlige eller brukes med en av de spesielle Varian kontrollere (serie 969- radioaktive gasser skal de relevante forskriftene for de enkelte 9454, 969-9554), og må koples til hovedpumpen (se skjema i gasstypene følges.
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Seite 24: Käyttöohjeet
YLEISIÄ TIETOJA Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä,... - Seite 25 Lidä tietoja löytyy “Technical Information”-liitteestä. ! ! ! ! Sarjan V1000HT turbomolekyylipumppuja tulee käyttää VAARA! ainoastaan niihin sopivien varian valvojien kanssa (sarja 969- Jolloin pumppua käytetään myrkyllisten, tulenvaarallisten ja 9454, 969-9554) niiden täytyy olla yhdistettyinä radioaktiivisten kaasujen pumppaamiseen tulee seurata joka pääpumppuun (katso kaaviota osasta "Technical Information").
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Seite 26: Pdhgies Crhsews
£llh prÒsqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. H Varian den f◊rei kamm∂a euqÚnh Òson afor£ thn olikÿ ÿ merikÿ aq◊thsh twn odhgièn, thn akat£llhlh crÿsh ek m◊rouj anekpa∂deutou proswpikoÚ, auqa∂retej epemb£seij ÿ crÿsh pou den sumfwne∂... - Seite 27 Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj el∂kwsh M10 Varian ÿ sto “Varian advanced exchange service”, pou saj d∂nei th H tourmpoantl∂a me fl£ntza eisÒdou ConFlat pr◊pei na sterewqe∂ dunatÒthta na antikatastÿsete thn calasm◊nh antl∂a me m∂a £llh eniscum◊nh.
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Seite 28: General Information
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, im- proper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. - Seite 29 4668 Nm around its axis. The Turbo-V 1000HT series pump does not require any main- The turbopump with ISO inlet flange must be fixed to the vac- tenance.
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Seite 30: Technical Information
TECHNICAL INFORMATION The Turbo-V1000HT pump consists of a high fre- DESCRIPTION OF THE TURBOPUMP quency motor driving a turbine fitted with 8 bladed The Turbo-V1000HT pump is available in two ver- stages and 4 Macrotorr stages. The turbine rotates sions which differ only in their inlet flange. in an anticlockwise direction when viewed from the They are: high vacuum flange end. -
Seite 31: Technical Specification
Start-up time < 4 minutes * According to standard DIN 28 428, the base Recommended mechanical: Varian SD 450 pressure is that measured in a leak-free test dome, forepump diaphragm: Varian MD 60 48 hours after the completion of test dome bake-... - Seite 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-892-01(D)
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Seite 33: Inlet Screen Installation
TECHNICAL INFORMATION INLET SCREEN INSTALLATION HEATER BAND INSTALLATION The inlet screens mod. 969-9316 prevents the blades of the pump from being damaged by debris greater than 0.7 mm diameter. The inlet screen, however, will reduce the pumping speed by about 10%. The inlet screen is fitted in the upper part of the pump, as shown in the figure. -
Seite 34: Water Cooling Kit Installation
TECHNICAL INFORMATION Switch on the heater while the turbopump is in op- eration. In the event of turbopump overheat, the heater will be automatically cut out by the thermis- tor sensor. NOTE The turbopump must be "baked" only when operat- ing with an inlet pressure less than 10 mbar and with water cooling. -
Seite 35: Air Cooling Kit Installation
TECHNICAL INFORMATION The overall dimensions of the pump when equipped with the water cooling kit mounted are shown in the following figure. AIR COOLING KIT INSTALLATION A fan kit model 969-9315 is available for air cooling the pump. Fan specification: −... -
Seite 36: Vent Device Installation
TECHNICAL INFORMATION VENT DEVICE INSTALLATION VENT VALVE INSTALLATION The vent valve mod. 969-9833 allows to avoid un- desired venting of the pump during a temporary power failure (5 sec maximum), and enables an automatic vent operation. The vent device mod. 969-9831 allows to avoid undesired venting of the pump during a temporary Unscrew the threaded plug (see figure below). -
Seite 37: Gas Purge Valve Installation
! ! ! ! CAUTION To prevent bearing damage, Varian suggests the following purge gas flow rates: 10 sccm (0.17 mbar l/s) for a mild purge process, or 20 sccm (0.34 mbar l/s) for an heavy process. Please contact Varian for specific applications. -
Seite 38: Typical Layout Diagram
TECHNICAL INFORMATION The recommended procedure to vent the system TYPICAL LAYOUT DIAGRAM and the pump avoiding the contact between the pump bearings and the corrosive gas is described in the following points: Close the corrosive gas flow into the system. Leaving the Turbo-V pump and the backing pump running and the purge gas flowing, wait for enough time to evacuate the corrosive gas... -
Seite 39: Connection A - High Vacuum Flange
For ConFlat flange connections we recommend using Varian hardware. Other hardware can be used if it satisfies to this specifications: − stainless steel screws − minimum strength point of 500 N/mm −... -
Seite 40: Connection B - Fore-Vacuum Pump
Vibration damper CFF 10” 969-9336 The result is increased electrical power consump- tion by the motor, most of which is dissipated in the For a complete overview of Varian's extensive rotor. product lines, please refer to the Varian catalog. 87-900-892-01(D) -
Seite 41: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Seite 42 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Seite 43 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...