Inhaltsverzeichnis
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Turbo-V300 ICE
Model 969-9076
Model 969-9083
Model 969-9095
Model 969-9096
87-900-897-01(C)
APRIL 2002
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Inhaltsverzeichnis
Verwandte Anleitungen für Varian Turbo-V300 ICE Series
Inhaltszusammenfassung für Varian Turbo-V300 ICE Series
- Seite 1 MANUALE DI ISTRUZIONI Turbo-V300 ICE BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING Model 969-9076 INSTRUKSTIONSBOG Model 969-9083 BRUKSANVISNING Model 969-9095 INSTRUKSJON MANUAL Model 969-9096 OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-897-01(C) APRIL 2002...
- Seite 2 Turbo-V300 ICE...
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Seite 5: Inhaltsverzeichnis
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO ....................9 GEBRUIKSAANWIJZINGEN ..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Seite 6: Informazioni Generali
"Technical Information" per ulteriori dettagli. chiatura. Le pompe turbomolecolari della serie Turbo-V300 ICE devono essere utilizzate solo con uno degli appositi controllori Varian NOTA (serie 969-9433, 969-9533) e devono essere collegate ad una pompa primaria (vedere schema in "Technical Information"). - Seite 7 In caso di guasto è possibile usufruire del servizio di coppia di 3,1 Nm. riparazione Varian o del "Varian advanced exchange service", Per l'installazione degli accessori opzionali, vedere "Technical che permette di ottenere una pompa rigenerata in sostituzione Information".
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Seite 8: Allgemeines
Weitere Hinweise: siehe Anhang "Technical Information”. ACHTUNG! Die Turbomolekularpumpen der Serie Turbo-V300 ICE dürfen nur mit einer der Varian-Spezial-Controller (Serie 969-9433, Die Warnhinweise vor bestimmten Prozeduren machen den 969-9533) benutzt werden und müssen an eine Primärpumpe Bediener darauf aufmerksam, daß bei Nichteinhaltung Schäden... -
Seite 9: Anwendung
Wenn die Pumpen über ihr Unterteil installiert werden sollen, ANMERKUNG müssen in die Bohrungen des Unterteils 3 M6-Schrauben Vor dem Versand einer defekten Pumpe an die Fa. Varian muß eingesetzt werden. Die Schrauben müssen eine Dehngrenze das Formular "Sicherheit und Gesundheit", das diesem von 500 N/mm haben und mit einen Anzugsmoment von 3.1... -
Seite 10: Indications Generales
être utilisées qu'avec l'un des contrôleurs spéciaux endommager sérieusement l'appareillage. Varian (série 969-9433, 969-9533) et elles doivent être connectées à une pompe primaire (voir schéma dans NOTE "Technical Information"). Les notes contiennent des renseignements importants, isolés du texte. - Seite 11 Pour l'installation des accessoires en option, voir "Technical réparations ou un "advanced exchange service", remplir et faire Information". parvenir au bureau local Varian la fiche "Sécurité et Santé" annexée à la présente notice d'instructions. Une copie de cette UTILISATION fiche devra être mise dans l'emballage de la pompe avant l'expédition.
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Seite 12: Información General
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... - Seite 13 En caso de avería se podrá utilizar el servicio de reparación Para fijar la bomba mediante su base, es necesario utilizar tres Varian o el "Varian advanced exchange service", que permite tornillos M6 fijados en los orificios correspondientes que se obtener una bomba regenerada para sustituir la averiada.
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Seite 14: Informações Gerais
Varian antes de usar a aparelhagem. A Varian não se responsabiliza pela eventual inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não autorizadas ou pelo uso contrário às normas... - Seite 15 Em caso de defeito é possível usufruir do serviço de reparação Para fixar a bomba através da sua base, é necessário utilizar Varian ou do "Varian advanced exchange service", que permite três parafusos M6 fixados aos furos específicos existentes na obter uma bomba regenerada que substitua a bomba com base da bomba.
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Seite 16: Algemene Informatie
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Seite 17 In geval van storing is het mogelijk om de reparatiedienst van M10 schroefdraad Varian of de "Varian advanced exchange service" in te schakelen: zo krijgt men een ruilpomp ter vervanging van de Om de pomp met behulp van zijn basis te bevestigen, zijn drie defecte pomp.
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Seite 18: Brugsanvisning
Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb på... - Seite 19 BRUGSANVISNING Brug altid vandafkøling under opvarmningen. ADVARSEL! Rør ikke ved turbopumpen eller eventuelt tilbehør under opvarmningsmanøvrerne. Den høje temperatur kan forårsage kvæstelser på personer. VIGTIGT! Til pumpens luftafløb anvendes luft eller en inaktiv luftart, der er fri for støv og partikler. Indgangstrykket gennem den særlige åbning skal være under 2 bar (over atmosfærisk tryk).
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Seite 20: Allmän Information
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Seite 21 öppnas. Vänta sedan tills rotorn stannat samt tills pumpens yttemperatur är lägre än 50ºC. Enkel klammer, gänga 11 Nm Om pumpen havererar, kontakta Varian reparationsverkstad eller Varian utbytesservice, som kan ersätta pumpen med en ISO 160 Dubbel klammer, gänga 22 Nm renoverad pump.
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Seite 22: Klargjøre Til Installasjon
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Seite 23 BRUKERVEILEDNING Bruk alltid vannavkjøling under oppvarmingen. ADVARSEL! Ikke berør turbopumpen eller noe av tilleggsutstyret under oppvarmingen. høye temperaturene føre brannskader. FORSIKTIG! Bruk støv- og partikkelfri luft eller inaktiv gass ved lufting av pumpen. Trykket ved inngangen må ikke være mindre enn 2 bar (over atmosfærisk trykk).
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Seite 24: Yleisiä Tietoja
Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä, valtuuttamattomista toimenpiteistä... - Seite 25 22 Nm ja että pumpun pintalämpö on alle 50º. Laitteen vahingoittuessa on mahdollista käyttää Varianin Yksinkertainen kiinnike, 11 Nm korjauspalvelua tai "Varian advanced exchange service", joka kierteitys M8 mahdollistaa regeneroidun pumpun saamisen vahingoittuneen ISO 160 Kaksoiskiinnike, kierteitys 22 Nm tilalle.
- Seite 26 £llh prÒsqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuˇj. H Varian den f◊rei kamm∂a euqÚnh Òson afor£ thn olikˇ ˇ merikˇ aq◊thsh twn odhgièn, thn akat£llhlh crˇsh ek m◊rouj anekpa∂deutou proswpikoÚ, auqa∂retej epemb£seij ˇ...
- Seite 27 Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto s◊rbij 22 Nm Monˇ dagk£nh episkeuèn Varian ˇ sto “Varian advanced exchange service”, pou elikwtˇ proexocˇ M10 saj d∂nei th dunatÒthta na antikatastˇsete thn calasm◊nh antl∂a me m∂a £llh eniscum◊nh. Gia na stereèsete thn antl∂a m◊sw thj b£shj thj e∂nai apara∂thto na crhsimopoiˇsete treij b∂dej M6, pou tij stereènete...
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Seite 28: General Information
See the appendix "Technical Information" for detailed information. CAUTION The Turbo-V300 ICE series pumps must only be used with one of the special Varian controllers (series 969-9433, 969-9533) The caution messages are displayed before procedures which, and must be connected to a primary pump (see "Technical... - Seite 29 FIXING FIXING TORQUE DEVICE MAINTENANCE ISO 100 M10 clamps 22 Nm The Turbo-V300 ICE series pump does not require any M8 claws 11 Nm maintenance. Any work performed on the pump must be carried ISO 160 M10 clamps 22 Nm out by authorized personnel.
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Seite 30: Technical Information
TECHNICAL INFORMATION are in form of discs. DESCRIPTION OF THE TURBOPUMP The turbine rotor is supported by permanently lu- The Turbo-V300 ICE pump is available in four ver- bricated high precision ceramic ball bearings in- sions which differ only in their inlet flange. They are: stalled on the forevacuum side of the pump. -
Seite 31: Technical Specification
Start-up time < 3 minutes Weight kg (lbs) 4.5 (10) Recommended mechanical: Varian DS 302 forepump diaphragm: Varian MD 60 * According to standard DIN 28 428, the base Operating pressure is that measured in a leak-free test dome,... - Seite 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-897-01(C)
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Seite 33: Inlet Screen Installation
TECHNICAL INFORMATION The screen can be mounted on each pump model INLET SCREEN INSTALLATION and is supplied with a small tab for easy removal (see figure). The inlet screens mod. 969-9302 and 969-9304 prevent the blades of the pump from being dam- aged by debris greater than 0.7 mm diameter. -
Seite 34: Heating Jacket Installation
TECHNICAL INFORMATION HEATING JACKET INSTALLATION WATER COOLING KIT INSTALLATION Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9337 (metal- lic model), and 969-9347 (plastic model). -
Seite 35: Vent Valve Installation
TECHNICAL INFORMATION The metallic model is assembled as shown in the VENT VALVE INSTALLATION figure. The vent valve mod. 969-9833 allows to avoid un- desired venting of the pump during a temporary power failure (5 sec maximum), and enables an automatic vent operation. -
Seite 36: Vent Device Installation
TECHNICAL INFORMATION Unscrew and remove the threaded plug (see figure below). Screw the flange mod. 969-9109 on the pump, tak- ing care of the o-ring right position. Assemble the seal ring and lock the vent device in position using the KF klamp. VENT DEVICE INSTALLATION The vent device mod. -
Seite 37: Solid State Flowmeter Installation
20 sccm that could move into the pump. (0.34 mbar l/s). Please contact Varian for specific applications. To the purge valve can be connected a solid state... -
Seite 38: Typical Layout Diagram
Fore-vacuum pump with internal one-way valve For ConFlat flange connections we recommend 10. Fore-vacuum pump control relay using Varian hardware. 11. Connection for water cooling To facilitate assembly and dismantling, apply Fel- 12. Roughing line with valve (optional) pro C-100 high temperature lubricant to the screw threads protruding from the flange and between 13. -
Seite 39: Connection Configurations
TECHNICAL INFORMATION Connection configurations Connection B - FORE-VACUUM PUMP Connection C - ELECTRICAL A flange KF 25 NW is available to connect the Turbo-V300 ICE to the fore-vacuum pump. A hose or vacuum approved pipe can be used. If a rigid pipe is used, any vibration generated by the me- chanical pump must be eliminated through the use of bellows. -
Seite 40: Suggested Pump Installation
The heater jacket working tempera- ture should be adjusted on the pump control unit (see controller manual for reference). Ask VARIAN Vacuum chamber for proper temperature setting. Heater jacket must be always on even during start-up and shutdown. -
Seite 41: Pump Used In Presence Of Magnetic Fields
Varian's specialist. As a matter of fact, in case of high magnetic fields, For a complete overview of Varian's extensive also important forces might be generated and ap- product lines, please refer to the Varian catalog. plied to the rotor. 87-900-897-01(C) -
Seite 42: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Seite 43 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Seite 44 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...