Inhaltsverzeichnis
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Turbo-V 1800A
Model 969-9064
Model 969-9065
Model 969-9066
87-900-867-01(A)
APRIL 2002
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
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Inhaltsverzeichnis
Verwandte Anleitungen für Varian Turbo-V 1800A
Inhaltszusammenfassung für Varian Turbo-V 1800A
- Seite 1 Turbo-V 1800A MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D’EMPLOI Model 969-9064 MANUAL DE INSTRUCCIONES Model 969-9065 Model 969-9066 MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-867-01(A) APRIL 2002...
- Seite 2 Turbo-V 1800A...
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Seite 5: Inhaltsverzeichnis
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO ....................9 GEBRUIKSAANWIJZINGEN ..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Seite 6: Informazioni Generali
ISTRUZIONI PER L'USO INFORMAZIONI GENERALI Questa apparecchiatura è destinata ad uso professionale. L'utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Varian prima dell'utilizzo dell'apparecchiatura. La Varian si ritiene sollevata eventuali responsabilità dovute... - Seite 7 è necessario fornire Le pompe turbomolecolari della serie Turbo-V1800A devono alla pompa un flusso di gas inerte (Azoto o Argon) per essere utilizzate solo con uno degli appositi controllori Varian proteggere cuscinetti (vedere l'appendice "Technical...
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Seite 8: Allgemeines
Nichtbeachtung -auch teilweise- der enthaltenen Hinweise, unsachgemäßem Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen und Mißachtung der einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V1800A handelt es sich um Turbomolekularpumpen für Hoch- Ultrahochvakuumanwendungen. -
Seite 9: Anwendung
Pumpenghehäuse unter 50°C abgesunken ist. speziellen Varian-Befestigungsmaterial an die Vakuumkammer angeschlossen werden. Weitere Hinweise siehe Anhang Bei einem Defekt kann der Varian Service oder der " advanced “Technical Information”. exchange service" in Anspruch genommen werden. Sollte die Pumpe auf ihren eigenen Standfüßen stehend betrieben werden, so müssen diese mittels der an den Füßen... -
Seite 10: Indications Generales
Varian, avant d'utiliser l'appareil. Varian décline par conséquent toute responsabilité en cas d'inobservation totale ou partielle des instructions données, d'utilisation incorrecte de la part d'un personnel non formé, d'opérations non autorisées ou d'un emploi contraire aux... - Seite 11 285 mm de diamètre (11,22 pouces). réparations ou un "advanced exchange service", remplir et faire Pour l’installation des accessoires en option, consulter parvenir au bureau local Varian la fiche "Sécurité et Santé" “Technical Information”. annexée à la présente notice d'instructions. Une copie de cette fiche devra être mise dans l'emballage de la pompe avant...
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Seite 12: Instrucciones De Uso
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... - Seite 13 Varian (serie 969-9561, 969-9461) y se conectarán a una suministrar a la bomba un caudal de gas inerte (Nitrógeno o bomba primaria (véase esquema en “Technical Information”).
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Seite 14: Instalação
Varian antes de usar a aparelhagem. A Varian não se responsabiliza pela eventual inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não autorizadas ou pelo uso contrário às normas... - Seite 15 "Technical Information". Em caso de defeito é possível usufruir do serviço de reparação Varian ou do "Varian advanced exchange service", que permite Se a bomba apoiar nos seus pés, estes deverão ser fixados ao plano de apoio utilizando os furos rosqueados M6 existentes na obter uma bomba regenerada que substitua a bomba com defeito.
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Seite 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Seite 17 In geval van storing is het mogelijk om de reparatiedienst van mechanische bevestigingselementen van Varian. Zie voor meer Varian of de "Varian advanced exchange service" in te informatie de bijlage “Technical Information”. schakelen: zo krijgt men een ruilpomp ter vervanging van de Als de pomp op haar pootjes wordt gezet, moeten deze pootjes defecte pomp.
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Seite 18: Brugsanvisning
Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb på... - Seite 19 “Technical Information” for yderligere detaljer. Turbomolekulærpumperne i Turbo-V1800A serien må kun PAS PÅ! anvendes med en af de særlige Varian kontrolapparater (serie 969-9561, 969-9461) og skal forbindes med en primær Til pumpning af ætsende luftarter er disse pumper forsynet med Turbopumpen kan monteres i vertikal stilling, eller med bunden en særlig åbning, hvortil den passive luftart (argon eller...
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Seite 20: Bruksanvisning
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Seite 21 Se bilagan “Technical information“ för ytterligare “Technical information“). upplysningar. Turbomolekylärpumparna i serien V1800A måste användas med en särskild styrenhet från Varian (serie 969-9561, 969- VARNING! 9461), och anslutas till en förpump (se schema i " Technical information"). Då pumpen används för pumpning av giftiga, lättantändliga Turbopumpen ska installeras i lodrät position eller uppochned...
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Seite 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Seite 23 Se “Teknisk informasjon” for detaljer. Turbo-V1800A serien turbo-molekulære pumper må kun brukes ADVARSEL! med en av de spesielle Varian kontrollere (serie 969-9561, 969- 9451), og må koples til hovedpumpen (se skjema i "Teknisk Når pumpen brukes for å pumpe giftige, brannfarlige eller informasjon").
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Seite 24: Käyttöohjeet
Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä, valtuuttamattomista toimenpiteistä... - Seite 25 (typpi tai argooni) jotta laakerit suojataan Information“-liitteestä. (katso liite “Technical information“). Sarjan Turbo-V1800A turbomolekyylipumppuja tulee käyttää ainoastaan niihin sopivien Varian-valvojien kanssa (sarja 969- 9551, 969-9461) ja niiden tulee olla yhdistettyinä pääpumppuun VAARA! (katso kaaviota osasta "Technical Information"). Jolloin pumppua käytetään myrkyllisten, tulenvaarallisten ja Turbopumppu tulee asentaa pystyasentoon tai ylösalaisin, niin...
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Seite 26: Pdhgies Crhsews
Varian, prin apÒ th crhsimopo∂hsh thj suskeuˇj. H Varian den f◊rei kamm∂a euqÚnh Òson afor£ thn olikˇ ˇ merikˇ aq◊thsh twn odhgièn, thn akat£llhlh crˇsh ek m◊rouj anekpa∂deutou proswpikoÚ, auqa∂retej epemb£seij ˇ crˇsh pou den sumfwne∂ me tij eidik◊j eqnik◊j diat£xeij. - Seite 27 ISO 250 22 Nm Diplˇ m◊ggenh el∂kwsh M10 Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto ser/ice thj Varian ˇ sto “Varian ad/anced exchange ser/ice”, pou saj 22 Nm Monˇ m◊ggenh d∂nei th dunatÒthta na antikatastˇsete thn calasm◊nh el∂kwsh M10 antl∂a me m∂a £llh eniscum◊nh.
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Seite 28: General Information
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, im- proper use by untrained persons, non-authorised interference with the equipment or any action contrary to that provided for by specific national standards. - Seite 29 The pump can either rest on its support pedestal or it can be MAINTENANCE suspended from the high vacuum flange. The Turbo-V 1800A series pump does not require any mainte- Fix the turbopump in a stable position connecting the inlet nance. Any work performed on the pump must be carried out flange of the turbopump to a fixed counter-flange capable of by authorized personnel.
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Seite 30: Technical Information
TECHNICAL INFORMATION The Turbo-V1800A pump consists of a medium DESCRIPTION OF THE TURBOPUMP frequency motor driving a turbine fitted with 12 The Turbo-V1800A pump is available in three bladed stages. The turbine rotates in an anticlock- models. The three models, which differ only in the wise direction when viewed from the high vacuum high vacuum flange, are: flange end. -
Seite 31: Technical Specification
Start-up time 10 minutes * According to standard DIN 28 428, the base Recommended Varian SD 700 pressure is that measured in a leak-free test forepump dome, 48 hours after the completion of test dome bake-out, with a Turbopump fitted with a ConFlat... - Seite 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-867-01(A)
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Seite 33: Inlet Screen Installation
TECHNICAL INFORMATION INLET SCREEN INSTALLATION HEATER BAND INSTALLATION The inlet screens mod. 969-9306 prevents the blades of the pump from being damaged by debris greater than 2 mm diameter. The inlet screen, however, will reduce the pumping speed by about 15%. The inlet screen is fitted in the upper part of the The heater band model 969-9811 and 969-9812 pump, as shown in the figure. -
Seite 34: Gas Purge Valve Installation
TECHNICAL INFORMATION power failure (5 sec maximum), and enables an NOTE automatic vent operation. The turbopump must be "baked" only when operating with an inlet pressure less than 10 Screw the vent valve into the vent port of the pump mbar and with water cooling. -
Seite 35: Typical Layout Diagram
Fore-vacuum pump with internal one-way valve For ConFlat flange connections we recommend 10. Fore-vacuum pump control relay using Varian hardware. 11. Connection for water cooling To facilitate assembly and dismantling, apply Fel- pro C-100 high temperature lubricant to the screw 12. -
Seite 36: Connection B - Fore-Vacuum Pump
0.1 to 0.8 mbar l/s. sensor automatically cuts out the power supply. CAUTION To prevent bearing damage, Varian suggests a minimum purge gas flow rate of 10 sccm (0.17 mbar l/s). This value can be exceeded, according to the process requirements. Please contact Var- ian for specific applications. -
Seite 37: Pump Used In Presence Of Magnetic Fields
220/380 V, 50 Hz motor Forepump SD 700 with 1 0424-P1241-307 ph., 120/220 V, 60 Hz motor Forepump SD 700, with 3 0424-P1241-337 ph., universal motor For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. 87-900-867-01(A) -
Seite 38: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Seite 39 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Seite 40 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...