Use - Agilent Technologies TPS-compact 969-8217 Bedienungshandbuch

Use

This paragraph details the fundamental operating procedures. Make
all electrical an pneumatic connections before the use of the system.
While heating the vacuum chamber, the temperature of the inlet
flange must not exceed 120 °C.
WARNING! Never use the pumping system when the turboinlet flange is not connected to
the vacuum chamber or is not blanked.
WARNING!
Do not touch the turbopump or any of its accessories during the heating
process. The high temperatures may cause burns.
WARNING! Avoid impacts or harsh movements of the pump when in operation. The
bearings may become damaged and damages to the persons or the things
could be taken place.
Use inert gas free from dust, particles or humidity (like Nitrogen) for venting the
CAUTION!
pump. The pressure at the vent port must be less than 2 bar (above atmospheric
pressure).
TPS-compact User Manual / 87-901-010-01 (C)
Instructions for Use

Use

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