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7 Technical Data
Measurement principle
Measuring range
Max. overload
Accuracy
Repeatability
Materials in contact
with vacuum
Anode material
Anode voltage
Reaction time
Operating temperature
Storage temperature
heat conduction Pirani / cold cathode (inverted
magnetron), depending on gas type
-9
1000 - 5.0x10
mbar (750 - 5.0x10
10 bar abs.
1000 ... 10 mbar: approx. 30% f. reading
-3
10 ... 2.0x10
mbar: 10% f. reading
-3
2.0x10
... 1.0x10
-2
10 ... 1.0x10
mbar: approx. 2% f. reading
-2
1.0x10
... 1.0x10
reading
stainl. steel 1.4307, tungsten, nickel, glass,
molybdenium, Al
O
2
molybdenium
< 2.5 kV
50 ms (switching on cold cathode < 2 s)
5 ... 60 C
-40 ... +65 C
-9
-8
mbar: 25% f. reading
-8
mbar: approx. 7% f.
ceramic
3
VSM-EtherCAT-200116
43
Torr)
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