Technical Data - thyracont VSP63D Betriebsanleitung

7 Technical Data

Measurement principle
Measuring range
Max. overload
Accuracy
Repeatability
Materials in contact
with vacuum
Reaction time
Operating temperature
Storage temperature
Bake-out temperature
Voltage supply
heat conduction Pirani,
depending on gas type
VSP: 1000 - 1.0x10
VCP: 1000 - 5.0x10
10 bar abs.
VSP:
1000 ... 20 mbar: approx. 30% f. reading
-3
20 ... 2.0x10 mbar: 10% f. reading
VCP:
1000 ... 10 mbar: approx. 30% f. reading
-2
10 ... 1.0x10 mbar: 10% f. reading
VSP: 20 ... 2.0x10
VCP: 10 ... 1.0x10
VSP: stainl. steel 1.4307, tungsten, nickel, glass
VCP: stainl. steel 1.4307, platinum/rhodium,
nickel, glass
40 ms
5 ... 60 C
-40 ... +65 C
max. 150 C at the flange (voltage supply
switched-off)
20 - 30 VDC
-4
mbar (750 - 1.0x10
-4
mbar (750 - 5.0x10
-3
mbar: 2% f. reading
-2
mbar: 5% f. reading
VSP/VCP-RS485-200116
51
-4
Torr)
-4
Torr)